MEMS DEVICE QUADRATURE SHIFT CANCELLATION
First Claim
1. A quadrature correction apparatus comprising:
- a drive charge-to-voltage (C2V) converter configured to provide drive information of a proof mass of a MEMS gyroscope;
a sense C2V converter configured to provide sense information of the proof mass;
a phase-shift module configured to provide phase shift information of the drive information;
a drive demodulator configured to receive the drive information and the phase shift information and to provide demodulated drive information;
a sense demodulator configured to receive the sense information and the phase shift information and to provide demodulated sense information; and
wherein the quadrature correction apparatus is configured to provide corrected sense information using the demodulated drive information and the demodulated sense information.
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Abstract
This document discusses, among other things, apparatus and methods quadrature cancelation of sense information from a micro-electromechanical system (MEMS) device, such as a MEMS gyroscope. In certain examples, a quadrature correction apparatus can include a drive charge-to-voltage (C2V) converter configured to provide drive information of a proof mass of a MEMS gyroscope, a sense C2V converter configured to provide sense information of the proof mass, a phase-shift module configured to provide phase shift information of the drive information, a drive demodulator configured to receive the drive information and the phase shift information and to provide demodulated drive information, a sense demodulator configured to receive the sense information and the phase shift information and to provide demodulated sense information, and wherein the quadrature correction apparatus is configured to provide corrected sense information using the demodulated drive information and the demodulated sense information.
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Citations
21 Claims
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1. A quadrature correction apparatus comprising:
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a drive charge-to-voltage (C2V) converter configured to provide drive information of a proof mass of a MEMS gyroscope; a sense C2V converter configured to provide sense information of the proof mass; a phase-shift module configured to provide phase shift information of the drive information; a drive demodulator configured to receive the drive information and the phase shift information and to provide demodulated drive information; a sense demodulator configured to receive the sense information and the phase shift information and to provide demodulated sense information; and wherein the quadrature correction apparatus is configured to provide corrected sense information using the demodulated drive information and the demodulated sense information. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method comprising:
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providing drive information of a proof mass of a MEMS gyroscope using a drive charge-to-voltage (C2V) converter; providing sense information of the proof mass using a sense C2V converter; providing phase shift information of the drive information using the drive information and a phase-shift module; demodulating the drive information using a drive demodulator and the phase shift information to provide demodulated drive information; demodulating the sense information using a sense demodulator and the phase shift information to provide demodulated sense information; and canceling quadrature error of the sense information to provide a corrected sense signal using the demodulated drive information and the demodulated sense information. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A system comprising:
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a MEMS device including a proof mass; a control circuit configured to provide sense information of the proof mass, the control circuit including; a drive charge-to voltage (C2V) converter configured to couple to the proof mass and to provide drive information of the proof mass; a sense C2V converter configured to receive a sense signal from the proof mass and to provide sense information of the proof mass; a phase-shift module configured provide phase shift information using the drive information; a drive demodulator configured to receive phase shift information and an the drive information to provide a demodulated drive signal; a sense demodulator configured to the phase shift information and the sense information to provide a demodulated sense signal; a summing node configured to cancel quadrature error of the sense information and to provide a corrected sense signal using a sum of the demodulated drive signal and the demodulated sense signal. - View Dependent Claims (18, 19, 20, 21)
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Specification