PHYSICAL QUANTITY SENSOR AND ELECTRONIC APPARATUS

• US 20130269434A1
• Filed: 04/09/2013
• Published: 10/17/2013
• Est. Priority Date: 04/11/2012
• Status: Active Grant

• Current Assignee: 138 East LCD Advancements Limited (Vector Capital Corporation)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: KAMISUKI, Shinichi
• Granted Patent: US 9,377,484 B2
• Time in Patent Office: Days
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Abstract

A physical quantity sensor includes: a first substrate including a first fixed electrode portion disposed on a first base surface and a first through-hole penetrating the front and rear of the substrate; a second substrate including a second fixed electrode portion disposed on a second base surface and a second through-hole penetrating the front and rear of the substrate, the second base surface being arranged to face the first base surface; and a movable body arranged between the first substrate and the second substrate with gaps and including a movable electrode portion facing the first fixed electrode portion and the second fixed electrode portion. In the first through-hole, a first through-electrode electrically connected with the first fixed electrode portion is disposed. In the second through-hole, a second through-electrode electrically connected with the second fixed electrode portion is disposed.

Claims

1. A physical quantity sensor comprising:

a first substrate including a first fixed electrode portion disposed on a first base surface and a first through-hole penetrating the front and rear of the first substrate;

a second substrate including a second fixed electrode portion disposed on a second base surface and a second through-hole penetrating the front and rear of the second substrate, the second base surface being arranged to face the first base surface; and

a movable body arranged between the first substrate and the second substrate and including a movable electrode portion facing the first fixed electrode portion and the second fixed electrode portion, wherein

a first through-electrode electrically connected with the first fixed electrode portion is disposed in the first through-hole, and

a second through-electrode electrically connected with the second fixed electrode portion is disposed in the second through-hole.

2. The physical quantity sensor according to claim 1, wherein

an electrical characteristic of a wiring from the first fixed electrode portion to the first through-electrode is the same as an electrical characteristic of a wiring from the second fixed electrode portion to the second through-electrode.

3. The physical quantity sensor according to claim 1, wherein

the first through-hole is arranged so as to overlap with at least a portion of the first fixed electrode portion in plan view, and

the second through-hole is arranged so as to overlap with at least a portion of the second fixed electrode portion in plan view.

4. The physical quantity sensor according to claim 1, wherein

the first substrate has a first outer surface having a front-and-rear relationship with the first base surface,

the second substrate has a second outer surface having a front-and-rear relationship with the second base surface,

a first wiring connected to the first through-electrode is disposed on the first outer surface,

a second wiring connected to the second through-electrode is disposed on the second outer surface, and

the first wiring has the same electrical characteristic as that of the second wiring.

5. The physical quantity sensor according to claim 4, wherein

the first wiring extends from over the first outer surface of the first substrate to over a side surface of the first substrate, and

the second wiring extends from over the second outer surface of the second substrate to over a side surface of the second substrate.

6. The physical quantity sensor according to claim 1, wherein

a first protruding portion is disposed on the first base surface of the first substrate,

a second protruding portion is disposed on the second base surface of the second substrate, and

the movable body is held between the first protruding portion and the second protruding portion.

7. An electronic apparatus comprising the physical quantity sensor according to claim 1.