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Microwave plasma torch generating laminar flow for materials processing

  • US 20130270261A1
  • Filed: 04/13/2012
  • Published: 10/17/2013
  • Est. Priority Date: 04/13/2012
  • Status: Active Grant
First Claim
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1. A microwave plasma torch comprising:

  • a set of staggered concentric tubes, an outer tube, an inner tube and a middle tube, said tubes comprising a dielectric material, said outer tube having an open end for passage of plasma, said middle tube disposed within and concentric to said outer tube and extending towards said open end but not beyond said outer tube, said inner tube disposed within said middle tube and extending towards said open end but not beyond said middle tube, said inner tube having a tapered end;

    a first injection port for injecting gas between said outer and middle tubes towards said open end;

    a second injection port for injecting gas between said middle and inner tubes towards said open end;

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