Microwave plasma torch generating laminar flow for materials processing
First Claim
1. A microwave plasma torch comprising:
- a set of staggered concentric tubes, an outer tube, an inner tube and a middle tube, said tubes comprising a dielectric material, said outer tube having an open end for passage of plasma, said middle tube disposed within and concentric to said outer tube and extending towards said open end but not beyond said outer tube, said inner tube disposed within said middle tube and extending towards said open end but not beyond said middle tube, said inner tube having a tapered end;
a first injection port for injecting gas between said outer and middle tubes towards said open end;
a second injection port for injecting gas between said middle and inner tubes towards said open end;
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Accused Products
Abstract
A microwave plasma torch providing two laminar flows is described. Two laminar flows are created using a set of at least three concentric, staggered dielectric tubes connected to a pressurized gas source. An inner laminar flow entrains injected particles entering the plasma. An outer laminar flow creates a sheath around the plasma and prevents it from attaching to the walls of the plasma torch. The entry point of the gas source is designed to ensure laminar flow for both the entrainment of the particles and for the shielding of the plasma plume. The uniform processing conditions results in uniform particles and a homogenous materials distribution. This enables a final product with improved thermal properties, improved corrosion and wear resistance and a higher tolerance to interface stresses. The microwave plasma torch can be used for producing nanomaterial powder and for spray coating materials onto various substrates.
101 Citations
21 Claims
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1. A microwave plasma torch comprising:
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a set of staggered concentric tubes, an outer tube, an inner tube and a middle tube, said tubes comprising a dielectric material, said outer tube having an open end for passage of plasma, said middle tube disposed within and concentric to said outer tube and extending towards said open end but not beyond said outer tube, said inner tube disposed within said middle tube and extending towards said open end but not beyond said middle tube, said inner tube having a tapered end; a first injection port for injecting gas between said outer and middle tubes towards said open end; a second injection port for injecting gas between said middle and inner tubes towards said open end; - View Dependent Claims (2, 3, 4, 5, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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6. (canceled)
Specification