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LOW PROFILE CRYOPUMP

  • US 20130276466A1
  • Filed: 04/20/2012
  • Published: 10/24/2013
  • Est. Priority Date: 04/20/2012
  • Status: Active Grant
First Claim
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1. A cryopump cooled by a GM type refrigerator, the cryopump comprising:

  • a two-stage expander cylinder and an inlet that is in a plane parallel to an axis of the expander cylinder;

    a first stage cryopanel assembly attached to a first stage heat station of said expander cylinder, that encloses a second stage cryopanel assembly attached to the second stage of said expander cylinder, said second stage cryopanel assembly comprises plates with flat surfaces one or more of which are folded and extend over at least 90% of the cold end of the second stage cylinder of said expander cylinder.

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