SELF CALIBRATING MICRO-FABRICATED LOAD CELLS
First Claim
Patent Images
1. A self calibrating load cell, comprising:
- a resonant double ended tuning fork force sensor; and
a phase locked loop circuit for detection of frequency changes upon external load application to the resonant double ended tuning fork force sensor.
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Abstract
Self calibrating micro-fabricated load cells are disclosed. According to one embodiment, a self calibrating load cell comprises a resonant double ended tuning fork force sensor and a phase locked loop circuit for detection of frequency changes upon external load application to the resonant double ended tuning fork force sensor.
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Citations
20 Claims
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1. A self calibrating load cell, comprising:
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a resonant double ended tuning fork force sensor; and a phase locked loop circuit for detection of frequency changes upon external load application to the resonant double ended tuning fork force sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of characterization, comprising:
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applying external axial force (compressive or tensile) to a resonant double ended tuning fork force sensor, wherein a natural frequency of tines of resonant double ended tuning fork force sensor decreases or increases in response to the applied external axial force; and detecting the decrease or increase in natural frequency by means of a phase locked loop circuit. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A load cell assembled on a printed circuit board (PCB), comprising:
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a force sensor; and a circuit for detection of frequency changes upon external load application to the force sensor. - View Dependent Claims (18, 19, 20)
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Specification