Micromechanical sensor element and sensor device having this type of sensor element
First Claim
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1. A micromechanical sensor element for detecting a lateral acceleration, comprising:
- at least two boundaries situated essentially orthogonally with respect to one another; and
at least one spring element, wherein the spring element is oriented at an angle relative to at least one of the boundaries.
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Abstract
A micromechanical sensor element for detecting lateral acceleration, having at least two boundaries situated essentially orthogonally with respect to one another, and also having at least one spring element, in which the spring element is oriented at an angle relative to at least one of the boundaries.
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Citations
9 Claims
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1. A micromechanical sensor element for detecting a lateral acceleration, comprising:
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at least two boundaries situated essentially orthogonally with respect to one another; and at least one spring element, wherein the spring element is oriented at an angle relative to at least one of the boundaries. - View Dependent Claims (2, 3)
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4. A micromechanical sensor device, comprising:
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at least two micromechanical sensor elements, each of the micromechanical sensor elements being for detecting a lateral acceleration, and including at least two boundaries situated essentially orthogonally with respect to one another, and including at least one spring element, wherein the spring element is oriented at an angle relative to at least one of the boundaries; and a micromechanical Z acceleration sensor element. - View Dependent Claims (5, 6)
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7. A sensor system, comprising:
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a micromechanical sensor device, including; at least two micromechanical sensor elements, each of the micromechanical sensor elements being for detecting a lateral acceleration, and including at least two boundaries situated essentially orthogonally with respect to one another, and including at least one spring element, wherein the spring element is oriented at an angle relative to at least one of the boundaries; and a micromechanical Z acceleration sensor element; a yaw rate sensor device; and a shared evaluation device for evaluating data of the sensor device and of the yaw rate sensor device. - View Dependent Claims (8, 9)
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Specification