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PIEZOELECTRIC MICROMACHINED ULTRASOUND TRANSDUCER WITH PATTERNED ELECTRODES

  • US 20130278111A1
  • Filed: 03/15/2013
  • Published: 10/24/2013
  • Est. Priority Date: 04/19/2012
  • Status: Abandoned Application
First Claim
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1. A device formed of a clamped, micromachined structure, the device comprising:

  • a piezoelectric material having a top surface and a bottom surface;

    a first group of electrodes forming a pattern on the top surface of the first piezoelectric material; and

    a second group of electrodes forming the pattern on the bottom surface of the first piezoelectric material.

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