ISOTROPICALLY-ETCHED CAVITIES FOR EVANESCENT-MODE ELECTROMAGNETIC-WAVE CAVITY RESONATORS
First Claim
1. A device comprising:
- an evanescent-mode electromagnetic-wave cavity resonator including;
an isotropically-etched cavity operable to support one or more evanescent electromagnetic wave modes, the isotropically-etched cavity including an inner cavity surface and a mating surface around a periphery of the cavity, the inner cavity surface having a conductive layer deposited or patterned thereon;
a cavity ceiling arranged to form a volume in conjunction with the isotropically-etched cavity, the cavity ceiling including a cavity ceiling surface having a conductive layer deposited or patterned thereon; and
a capacitive tuning structure having a portion that is located at least partially within the volume so as to support the one or more evanescent electromagnetic wave modes, the tuning structure being formed from a conductive material or having a conductive layer deposited or patterned thereon, a distal surface of the tuning structure being separated from the closest surface thereto by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially on the gap distance.
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Accused Products
Abstract
This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the resonator includes an isotropically-etched cavity operable to support one or more evanescent electromagnetic wave modes. In some implementations, the resonator also includes a cavity ceiling arranged to form a volume in conjunction with the isotropically-etched cavity. In some implementations, the resonator also includes a capacitive tuning structure having a portion that is located at least partially within the volume so as to support the evanescent electromagnetic wave modes. In some implementations, a distal surface of the tuning structure is separated from the closest surface to it by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially on the gap distance.
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Citations
38 Claims
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1. A device comprising:
an evanescent-mode electromagnetic-wave cavity resonator including; an isotropically-etched cavity operable to support one or more evanescent electromagnetic wave modes, the isotropically-etched cavity including an inner cavity surface and a mating surface around a periphery of the cavity, the inner cavity surface having a conductive layer deposited or patterned thereon; a cavity ceiling arranged to form a volume in conjunction with the isotropically-etched cavity, the cavity ceiling including a cavity ceiling surface having a conductive layer deposited or patterned thereon; and a capacitive tuning structure having a portion that is located at least partially within the volume so as to support the one or more evanescent electromagnetic wave modes, the tuning structure being formed from a conductive material or having a conductive layer deposited or patterned thereon, a distal surface of the tuning structure being separated from the closest surface thereto by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially on the gap distance. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A method comprising:
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producing a cavity substrate; positioning the cavity substrate over an etch-stop substrate; connecting a lower surface of the cavity substrate with an upper surface of the etch-stop substrate; and isotropically etching the cavity substrate to produce a plurality of cavities, each cavity being suitable for use in an evanescent-mode electromagnetic wave cavity resonator. - View Dependent Claims (27, 28, 29, 30, 31)
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32. A device comprising:
an evanescent-mode electromagnetic-wave cavity resonating means including; an isotropically-etched cavity means operable to support one or more evanescent electromagnetic wave modes, the isotropically-etched cavity means including an inner cavity surface and a mating means around a periphery of the cavity, the inner cavity surface having a conducting means deposited or patterned thereon; a cavity ceiling means arranged to form a volume in conjunction with the isotropically-etched cavity means, the cavity ceiling means including a cavity ceiling surface having a conducting means deposited or patterned thereon; and a capacitive tuning means having a portion that is located at least partially within the volume so as to support the one or more evanescent electromagnetic wave modes, the tuning means being formed from a conductive material or having a conductive means deposited or patterned thereon, a distal surface of the tuning means being separated from the closest surface thereto by a gap distance, a resonant electromagnetic wave mode of the cavity resonating means being dependent at least partially on the gap distance. - View Dependent Claims (33, 34, 35, 36, 37, 38)
Specification