IN-PLANE RESONATOR STRUCTURES FOR EVANESCENT-MODE ELECTROMAGNETIC-WAVE CAVITY RESONATORS
First Claim
1. A device comprising:
- an evanescent-mode electromagnetic-wave cavity resonator comprising;
a lower cavity portion having an inner cavity surface and a mating surface around the periphery of the inner cavity surface of the lower cavity portion, the inner cavity surface of the lower cavity portion having a conductive layer deposited or patterned thereon;
an upper cavity portion having an inner cavity surface and a mating surface around the periphery of the inner cavity surface of the upper cavity portion, the inner cavity surface of the upper cavity portion having a conductive layer deposited or patterned thereon, the upper cavity portion and the lower cavity portion forming a volume therebetween, the volume being operable to support one or more evanescent electromagnetic wave modes; and
an in-plane lithographically-defined resonator structure having a portion that is located at least partially within the volume so as to support the one or more evanescent electromagnetic wave modes, the resonator structure being formed of a conductive material or having a conductive layer deposited or patterned thereon, an upper mating surface of the resonator structure being mated with, bonded with, or otherwise connected with the mating surface of the upper cavity portion, a lower mating surface of the resonator structure being mated with, bonded with, or otherwise connected with the mating surface of the lower cavity portion, a distal surface of the resonator structure being separated or electrically insulated from the closest surface thereto by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially upon the gap distance.
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Accused Products
Abstract
This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the cavity resonator includes a lower cavity portion and an upper cavity portion that together form a volume. The cavity resonator also includes an in-plane lithographically-defined resonator structure having a portion that is located at least partially within the volume to support one or more evanescent electromagnetic wave modes. In some implementations, an upper surface of the resonator structure is connected with the upper cavity portion while a lower mating surface is connected with the lower cavity portion. A distal surface of the resonator structure is separated or electrically insulated from the closest surface to it by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially upon the gap distance.
17 Citations
24 Claims
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1. A device comprising:
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an evanescent-mode electromagnetic-wave cavity resonator comprising; a lower cavity portion having an inner cavity surface and a mating surface around the periphery of the inner cavity surface of the lower cavity portion, the inner cavity surface of the lower cavity portion having a conductive layer deposited or patterned thereon; an upper cavity portion having an inner cavity surface and a mating surface around the periphery of the inner cavity surface of the upper cavity portion, the inner cavity surface of the upper cavity portion having a conductive layer deposited or patterned thereon, the upper cavity portion and the lower cavity portion forming a volume therebetween, the volume being operable to support one or more evanescent electromagnetic wave modes; and an in-plane lithographically-defined resonator structure having a portion that is located at least partially within the volume so as to support the one or more evanescent electromagnetic wave modes, the resonator structure being formed of a conductive material or having a conductive layer deposited or patterned thereon, an upper mating surface of the resonator structure being mated with, bonded with, or otherwise connected with the mating surface of the upper cavity portion, a lower mating surface of the resonator structure being mated with, bonded with, or otherwise connected with the mating surface of the lower cavity portion, a distal surface of the resonator structure being separated or electrically insulated from the closest surface thereto by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially upon the gap distance. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A device comprising:
an evanescent-mode electromagnetic-wave cavity resonator comprising; a lower cavity means having an inner cavity surface and a mating means around the periphery of the inner cavity surface of the lower cavity means, the inner cavity surface of the lower cavity means having a conductive means deposited or patterned thereon; an upper cavity means having an inner cavity surface and a mating means around the periphery of the inner cavity surface of the upper cavity means, the inner cavity surface of the upper cavity means having a conductive means deposited or patterned thereon, the upper cavity means and the lower cavity means forming a volume therebetween, the volume being operable to support one or more evanescent electromagnetic wave modes; and an in-plane lithographically-defined resonating means having a portion that is located at least partially within the volume so as to support the one or more evanescent electromagnetic wave modes, the in-plane lithographically-defined resonating means being formed of a conductive material or having a conductive means deposited or patterned thereon, an upper mating means of the in-plane lithographically-defined resonating means being mated with, bonded with, or otherwise connected with the mating means of the upper cavity means, a lower mating means of the in-plane lithographically-defined resonating means being mated with, bonded with, or otherwise connected with the mating means of the lower cavity means, a distal surface of the in-plane lithographically-defined resonating means being separated or electrically insulated from the closest surface thereto by a gap distance, a resonant electromagnetic wave mode of the cavity resonating means being dependent at least partially upon the gap distance. - View Dependent Claims (21, 22, 23, 24)
Specification