PARTICULATE MATTER DETECTION ELEMENT AND METHOD OF MANUFACTURING SAME
First Claim
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1. A particulate matter detection element for detecting particulate matter contained in a measured gas comprising:
- at least one pair of detection electrodes disposed opposite to each other on a detection surface of the particulate matter detection element; and
an output means for outputting a signal representing one of a resistance, a capacitance and a impedance between the pair of the detection elements as an electrical characteristic varying depending on an amount of particulate matter present between the pair of the detection electrodes;
whereinthe pair of the detection electrodes is constituted as an electrode layer laminated body in which first and second electrode layers each having a plate-like shape and a thickness in a range between 50 μ
m and 500 μ
m are laminated on each other through an intermediate insulating layer having a plate-like shape and a thickness in a range between 3 μ
m and 20 μ
m, anda cross-sectional surface in a lamination direction of the electrode layer laminated body exposed to outside is used as the detection surface of the particulate matter detection element.
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Abstract
The particulate matter detection element is constituted of a laminated body including first and second electrode layers each having a plate-like shape and a thickness between 50 μm and 500 μm laminated on each other through an intermediate insulating layer having a plate-like shape and a thickness between 3 μm and 20 μm. A cross-sectional surface of the laminated body in the lamination direction is used as a detection surface of the particulate matter detection element.
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Citations
14 Claims
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1. A particulate matter detection element for detecting particulate matter contained in a measured gas comprising:
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at least one pair of detection electrodes disposed opposite to each other on a detection surface of the particulate matter detection element; and an output means for outputting a signal representing one of a resistance, a capacitance and a impedance between the pair of the detection elements as an electrical characteristic varying depending on an amount of particulate matter present between the pair of the detection electrodes; wherein the pair of the detection electrodes is constituted as an electrode layer laminated body in which first and second electrode layers each having a plate-like shape and a thickness in a range between 50 μ
m and 500 μ
m are laminated on each other through an intermediate insulating layer having a plate-like shape and a thickness in a range between 3 μ
m and 20 μ
m, anda cross-sectional surface in a lamination direction of the electrode layer laminated body exposed to outside is used as the detection surface of the particulate matter detection element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 14)
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9. A method of manufacturing a particulate matter detection element for detecting particulate matter contained in a measured gas, the particulate matter detection element including at least one pair of detection electrodes disposed opposite to each other on a detection surface of the particulate matter detection element, and an output means for outputting a signal representing one of a resistance, a capacitance and a impedance between the pair of the detection elements as an electrical characteristic varying depending on an amount of the particulate matter present between the pair of the detection electrodes, the method comprising:
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an electrode layer forming step of forming a first green sheet for a first electrode layer and a second green sheet for a second electrode layer each having a plate-like shape and a thickness in a range between 50 μ
m and 500 μ
m using a perovskite-type conductive oxide metal selected from LNF (LaNi0.6Fe0.4O3), LSN (La1.2Sr0.8NiO4), LSM (La1-XSrXMnO3-δ
), LSC (La1-XSrXCoO3-δ
), LCC (La1-XCaXCrO3-δ
), and LSCN (La0.85Sr0.15Cr1-XNiXO3-δ
) (0.1≦
X≦
0.7);an insulating layer forming step of forming a third green sheet for an intermediate insulating layer having a plate-like shape and a thickness in a range between 3 μ
m and 20 μ
m using an insulating oxide material selected from a partially stabilized zirconia typified by 8YSZ((ZrO2)0.82(Y2O3)0.08), MgO and Al2O3; anda laminated body forming step of forming the electrode layer laminated body by laminating the first to third green sheets. - View Dependent Claims (10, 11)
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12. A method of manufacturing a particulate matter detection element for detecting particulate matter contained in a measured gas, the particulate matter detection element including at least one pair of detection electrodes disposed opposite to each other, and an output means for outputting a signal representing one of a resistance, a capacitance and a impedance between the pair of the detection elements as an electrical characteristic varying depending on an amount of particulate matter present between the pair of the detection electrodes, the method comprising:
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an electrode layer forming step of forming a first green sheet for a first electrode layer and a second green sheet for a second electrode layer each having a plate-like shape and a thickness in a range between 50 μ
m and 500 μ
m using a perovskite-type conductive oxide material selected from LNF (LaNi0.6Fe0.4O3), LSN (La1.2Sr0.8NiO4), LSM (La1-XSrXMnO3-δ
), LSC (La1-XSrXCoO3-δ
), LCC (La1-XCaXCrO3-δ
), and LSCN (La0.85Sr0.15Cr1-XNiXO3-δ
) (0.1≦
X≦
0.7);an insulating layer forming step of print-forming an intermediate insulating layer film having a plate-like shape and a thickness in a range between 3 μ
m and 20 μ
m on a surface of each of the first and second green sheets using an insulating oxide material selected from a partially stabilized zirconia typified by 8YSZ((ZrO2)0.82(Y2O3)0.08), MgO and Al2O3; anda laminated body forming step of forming the electrode layer laminated body by laminating the first and second green sheets formed with the intermediate insulating layer film. - View Dependent Claims (13)
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Specification