ULTRASOUND PROBE
First Claim
1. An ultrasound probe comprising:
- a capacitive vibration element configured to mutually convert ultrasound and an electric signal;
a semiconductor substrate including a plurality of the capacitive vibration elements formed on the surface thereof;
an acoustic lens provided on a front face side of the capacitive vibration element; and
a backing layer provided on a rear face side of the semiconductor substrate, whereinthe backing layer includes a first backing layer set in contact with the semiconductor substrate and a second backing layer provided on a rear face side of the first backing layer,an acoustic impedance of the first backing layer is set on the basis of thickness of the semiconductor substrate,the second backing layer is formed of an attenuating material capable of attenuating the ultrasound transmitted through the first backing layer, andan acoustic impedance of the second backing layer is set to match the acoustic impedance of the first backing layer.
4 Assignments
0 Petitions
Accused Products
Abstract
Disclosed is an ultrasonic probe comprising: CMUT cells (13) that mutually convert ultrasonic waves and electrical signals; a semiconductor substrate (15) that has a plurality of the CMUT cells (13) formed on the surface thereof; an acoustic lens (3) that is provided on the front face side of the CMUT cells (13); and a backing layer (5) that is provided on the rear face side of the semiconductor substrate (15). The backing layer (5) is formed by a first backing layer (27) that makes contact with the semiconductor substrate, and a second backing layer (29) that is provided on the rear face side of the backing layer (27). The acoustic impedance of the backing layer (27) is set based on the sheet thickness of the semiconductor substrate (15). The backing layer (29) is formed by attenuating material capable of attenuating ultrasonic waves transmitted through the backing layer (27). Multiple reflection of reflection echoes is suppressed by setting the acoustic impedance of the backing layer (29) to match the acoustic impedance of the backing layer (27).
27 Citations
10 Claims
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1. An ultrasound probe comprising:
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a capacitive vibration element configured to mutually convert ultrasound and an electric signal; a semiconductor substrate including a plurality of the capacitive vibration elements formed on the surface thereof; an acoustic lens provided on a front face side of the capacitive vibration element; and a backing layer provided on a rear face side of the semiconductor substrate, wherein the backing layer includes a first backing layer set in contact with the semiconductor substrate and a second backing layer provided on a rear face side of the first backing layer, an acoustic impedance of the first backing layer is set on the basis of thickness of the semiconductor substrate, the second backing layer is formed of an attenuating material capable of attenuating the ultrasound transmitted through the first backing layer, and an acoustic impedance of the second backing layer is set to match the acoustic impedance of the first backing layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification