COAXIAL / COAXIAL TREATMENT MODULE

• US 20130287637A1
• Filed: 04/30/2012
• Published: 10/31/2013
• Est. Priority Date: 04/30/2012
• Status: Active Grant

• Current Assignee: Highvac Corporation
• Original Assignee: Highvac Corporation
• Inventors: Vickery, Earl
• Granted Patent: US 9,089,811 B2
• Time in Patent Office: Days
• US Class Current: 422/169
• CPC Class Codes: B01D 2251/102 Oxygen
• CPC Class Codes: B01D 2251/11 Air
• CPC Class Codes: B01D 2252/103 Water
• CPC Class Codes: B01D 2257/553 Compounds comprising hydrogen, e.g. silanes
• CPC Class Codes: B01D 2258/0216 from CVD treatment or semi-conductor manufacturing
• CPC Class Codes: B01D 53/14 by absorption
• CPC Class Codes: B01D 53/18 Absorbing units; Liquid distributors therefor B01D3/16, B01D3/26, B01D3/30 take precedence; packing elements B01J19/30, B01J19/32
• CPC Class Codes: B01D 53/76 Gas phase processes, e.g. by using aerosols
• CPC Class Codes: B01D 53/79 Injecting reactants
• CPC Class Codes: F23D 2900/00016 Preventing or reducing deposit build-up on burner parts, e.g. from carbon
• CPC Class Codes: F23G 7/065 using gaseous or liquid fuel
• CPC Class Codes: F23J 15/04 using washing fluids scrubbers for removing solids only F23J15/022
• CPC Class Codes: F23J 2217/50 by cleaning fluids (washers or scrubbers)

Abstract

A treatment module for use in an abatement system for process exhaust gases. The treatment module has a centrally located flame wall oxidizer module that cause the process exhaust gases to travel within a cylinder of gas a short distance upon exiting the exhaust conduit before the gases are oxidized. Following oxidation, two coaxial cylinders of water spray flush solid, liquid and water soluble components of the oxidation products from the resulting oxidation products stream into a bottom water reservoir. The first inner water spray cylinder coaxially surrounds the flame wall oxidizer module and flows co-currently with the downward flow of oxidation products. The gaseous oxidation products then turn 180 degrees and pass upward through a second outer water spray cylinder located coaxial to and surrounding the first water spray. Thereafter, the remaining water insoluble gaseous oxidation products exit the treatment module.

Claims

1. A treatment module for use in an abatement system for process exhaust gases comprising:

a centrally located flame wall oxidizer module for oxidizing process exhaust gases after the gases travel within a cylinder of gas a short distance upon exiting the exhaust conduit,

a first inner coaxial cylinder of water spray surrounding the flame wall oxidizer module and flowing concurrent with the oxidation products stream that exits downward from the flame wall oxidizer module in order to flush solid, liquid and water soluble components of the oxidation products from the resulting oxidation products stream,

a second outer coaxial cylinder of water spray surrounding the first inner coaxial cylinder of water spray and flowing counter-current to the oxidation products stream flowing upward after the stream has turned 180 degrees at the bottom of the first inner coaxial cylinder , and

a bottom water reservoir for receiving water from the water spray of the two coaxial cylinders of water spray.

2. A treatment module for use in an abatement system for process exhaust gases according to claim 1 further comprising:

a containment vessel forming the wall of the bottom water reservoir and surrounding the flame wall oxidizer module and the two coaxial cylinders of water spray.

3. A treatment module for use in an abatement system for process exhaust gases according to claim 2 further comprising:

an exit provided in the containment vessel for exhausting the treated exhaust gases.

4. A treatment module for use in an abatement system for process exhaust gases according to claim 3 further comprising:

a perforated plate provided within the outer coaxial cylinder of water spray to increase contact between the exhaust gases and the water spray.

5. A treatment module for use in an abatement system for process exhaust gases according to claim 4 further comprising:

a demister provided between the outer coaxial cylinder of water spray and the exit to remove water particles from the exhaust gases.

6. A treatment module for use in an abatement system for process exhaust gases according to claim 5 further comprising:

a water pump supplying water to water misting nozzles within inner and outer coaxial cylinders of water spray.

7. A treatment module for use in an abatement system for process exhaust gases according to claim 6 further comprising:

flow meters for supplying fuel gas and oxidizer gas to said flame wall oxidizer module.

8. A treatment module for use in an abatement system for process exhaust gases comprising:

a flame wall oxidizer module that oxidizes process exhaust gases after the gases travel within a cylinder of gas upon exiting an exhaust conduit of the flame wall oxidizer module,

an inner coaxial cylinder of water spray surrounding the flame wall oxidizer module, water spray nozzles provided in said inner coaxial cylinder of water spray oriented so that they spray water in a direction concurrent with the oxidation products stream that exits from the flame wall oxidizer module,

an outer coaxial cylinder of water spray surrounding the inner coaxial cylinder of water spray, water spray nozzles provided in said outer coaxial cylinder of water spray oriented so that they spray water in a direction counter-current to the oxidation products stream that reversed its direction of flow after exiting the inner coaxial cylinder of water spray, and

a bottom water reservoir for receiving water from the two coaxial cylinders of water spray.

9. A treatment module for use in an abatement system for process exhaust gases according to claim 8 further comprising:

a containment vessel forming the wall of the bottom water reservoir and surrounding the flame wall oxidizer module and the two coaxial cylinders of water spray.

10. A treatment module for use in an abatement system for process exhaust gases according to claim 9 further comprising:

an exit provided in the containment vessel for exhausting treated exhaust gases.

11. A treatment module for use in an abatement system for process exhaust gases according to claim 10 further comprising:

a perforated plate provided within the outer coaxial cylinder of water spray to increase contact between the exhaust gases and the water spray emanating from the spray nozzles located within the outer coaxial cylinder of water spray.

12. A treatment module for use in an abatement system for process exhaust gases according to claim 11 further comprising:

a demister provided between the outer coaxial cylinder of water spray and the exit to remove water particles from the exhaust gases.

13. A treatment module for use in an abatement system for process exhaust gases according to claim 12 further comprising:

a water pump supplying water to said water misting nozzles located within the inner and outer coaxial cylinders of water spray.

14. A treatment module for use in an abatement system for process exhaust gases according to claim 13 further comprising:

flow meters for supplying fuel gas and oxidizer gas to said flame wall oxidizer module.

15. A treatment module for use in an abatement system for process exhaust gases comprising:

a centrally located flame wall oxidizer module for oxidizing process exhaust gases after the gases travel within a cylinder of gas a short distance upon exiting an exhaust conduit provided on the flame wall oxidizer module,

a first coaxial cylinder of water spray surrounding the flame wall oxidizer module and flowing concurrent with the stream of oxidation products that exits from the flame wall oxidizer module

a second coaxial cylinder of water spray flowing counter-current to the stream of oxidation products that exits from the first coaxial cylinder of water spray, and

a water reservoir for receiving water from the water spray of the two coaxial cylinders of water spray.

16. A treatment module for use in an abatement system for process exhaust gases according to claim 15 further comprising:

a containment vessel forming the wall of the bottom water reservoir and surrounding the flame wall oxidizer module and the two coaxial cylinders of water spray.

17. A treatment module for use in an abatement system for process exhaust gases according to claim 16 further comprising:

an exit provided in the containment vessel for exhausting the treated exhaust gases after passing through the two coaxial cylinders of water spray.

18. A treatment module for use in an abatement system for process exhaust gases according to claim 17 further comprising:

a perforated plate provided within the second coaxial cylinder of water spray to increase contact between the exhaust gases and the water spray.

19. A treatment module for use in an abatement system for process exhaust gases according to claim 18 further comprising:

a demister provided between the second coaxial cylinder of water spray and the exit to remove water particles from the exhaust gases.

20. A treatment module for use in an abatement system for process exhaust gases according to claim 19 further comprising:

a water pump supplying water to water misting nozzles located within inner and outer coaxial cylinders of water spray, and

flow meters for supplying fuel gas and oxidizer gas to the flame wall oxidizer module.