SOLAR CELL, METHOD FOR MANUFACTURING DOPANT LAYER, AND METHOD FOR MANUFACTURING SOLAR CELL
First Claim
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1. A method of manufacturing a solar cell, comprising:
- forming a dopant layer to a first surface of a semiconductor substrate by doping a dopant of a first conductive type and a count dopant of a second conductive type opposite to the first conductive type, wherein a doping amount of the count dopant is less than a doping amount of the dopant; and
forming an electrode electrically connected to the dopant layer.
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Abstract
In a method of manufacturing a solar cell includes forming a dopant layer by doping a dopant of a first conductive type and a count dopant of a second conductive type opposite to the first conductive type to a surface of a semiconductor substrate. Here, a doping amount of the count dopant is less than a doping amount of the dopant.
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Citations
20 Claims
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1. A method of manufacturing a solar cell, comprising:
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forming a dopant layer to a first surface of a semiconductor substrate by doping a dopant of a first conductive type and a count dopant of a second conductive type opposite to the first conductive type, wherein a doping amount of the count dopant is less than a doping amount of the dopant; and forming an electrode electrically connected to the dopant layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A solar cell, comprising:
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a semiconductor substrate; a dopant layer formed at a first surface of the semiconductor substrate; and an electrode electrically connected to the dopant layer, wherein the dopant layer comprises a dopant of a first conductive type and a count dopant of a second conductive type opposite to the first conductive type, and a doping concentration of the count dopant of the second conductivity type is less than a doping concentration of the dopant of the first conductivity type. - View Dependent Claims (20)
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Specification