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GAS SHOWERHEAD, METHOD FOR MAKING THE SAME AND THIN FILM GROWTH REACTOR

  • US 20130299009A1
  • Filed: 05/09/2013
  • Published: 11/14/2013
  • Est. Priority Date: 05/11/2012
  • Status: Active Grant
First Claim
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1. A gas showerhead, for isolatedly feeding at least a first reactant gas and a second reactant gas into a reaction chamber, comprising:

  • a gas distribution and diffusion plate, comprising a plurality of columns of first gas diffusion passages connecting to a first reactant gas source and a plurality of columns of second gas diffusion passages connecting to a second reactant gas source, and the plurality of columns of the first gas diffusion passages and the plurality of columns of the second gas diffusion passages are arranged alternately, and each column of the first gas diffusion passages and each column of the second gas diffusion passages both comprise a plurality of separated gas diffusion paths; and

    a water cooling plate, located below the gas distribution and diffusion plate, comprising a plurality of columns of cooling liquid passages, a plurality of first gas outlet passages provided for a reactant gas in the first gas diffusion passages to flow out, and a plurality of second gas outlet passages provided for a reactant gas in the second gas diffusion passages to flow out;

    wherein, the gas distribution and diffusion plate and the water cooling plate are two separated components and are assembled integrally in a detachable mechanical manner, and the first reactant gas and the second reactant gas are isolated from each other before escaping from the gas showerhead and entering the reaction chamber.

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