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INTEGRATED MAGNETORESISTIVE SENSOR, IN PARTICULAR THREE-AXIS MAGNETORESISTIVE SENSOR AND MANUFACTURING METHOD THEREOF

  • US 20130299930A1
  • Filed: 12/23/2011
  • Published: 11/14/2013
  • Est. Priority Date: 12/23/2010
  • Status: Active Grant
First Claim
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1. An integrated magnetoresistive device, comprising:

  • a substrate having first and second surfaces,an insulating layer extending on the first surface,a first magnetoresistor of a first ferromagnetic material extending in the insulating layer and having a sensitivity plane, anda concentrator of a second ferromagnetic material including a first arm extending longitudinally in a transversal direction to the sensitivity plane and vertically offset to the first magnetoresistor, the concentrator being configured to deflect magnetic flux lines directed perpendicularly to the sensitivity plane and to generate magnetic field components directed in a parallel direction to the sensitivity plane.

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