REPLACEMENT GATE ELECTRODE FILL AT REDUCED TEMPERATURES

• US 20130302974A1
• Filed: 05/08/2012
• Published: 11/14/2013
• Est. Priority Date: 05/08/2012
• Status: Abandoned Application

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: GlobalFoundries, Inc.
• Inventors: Hahn, Jens, Huisinga, Torsten, Hempel, Klaus, Kenny, Oisin
• Application Number:
  US13/466,247
• Publication Number:
  US 20130302974A1
• Time in Patent Office: Days
• US Class Current: 438/585
• CPC Class Codes: H01L 21/28088 the final conductor layer next to the insulator being a composite, e.g. TiN
• CPC Class Codes: H01L 21/823842 gate conductors with different gate conductor materials or different gate conductor implants, e.g. dual gate structures
• CPC Class Codes: H01L 29/66545 using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate

Abstract

Generally, the present disclosure is directed to forming conductive metal fill materials in replacement gate electrodes using reduced deposition temperatures. One illustrative method disclosed herein includes, among other things, forming a sacrificial gate structure above a semiconductor layer, the sacrificial gate structure including a dummy gate electrode, and forming a gate cavity by removing at least the dummy gate electrode from above the semiconductor layer. The disclosed method further includes forming a work-function material of a replacement metal gate electrode in the gate cavity, and forming a conductive metal fill material in the gate cavity and above the work-function material, wherein forming the conductive metal fill material includes performing a material deposition process at a temperature below approximately 450° C.

Claims

1. A method, comprising:

forming a sacrificial gate structure above a semiconductor layer, said sacrificial gate structure comprising a dummy gate electrode;

forming a gate cavity by removing at least said dummy gate electrode from above said semiconductor layer;

forming a work-function material of a replacement metal gate electrode in said gate cavity; and

forming a conductive metal fill material in said gate cavity and above said work-function material, wherein forming said conductive metal fill material comprises performing a physical vapor deposition process at a temperature below approximately 450°

C.

2. The method of claim 1, wherein forming said conductive metal fill material comprises performing said physical vapor deposition process at a temperature below approximately 420°

C.

3. The method of claim 1, wherein forming said conductive metal fill material comprises performing said physical vapor deposition process at a temperature below approximately 400°

C.

5. The method of claim 1, wherein forming said conductive metal fill material comprises forming an aluminum-germanium material alloy in said gate cavity and above said work-function material.

6. The method of claim 5, wherein forming said aluminum-germanium material alloy comprises forming said aluminum-germanium material alloy with a germanium content of approximately 5% atomic weight or less.

13. The method of claim 1, wherein said sacrificial gate structure further comprises a dummy gate dielectric layer, and wherein forming said gate cavity further comprises removing said dummy gate dielectric layer from above said semiconductor layer.

14. The method of claim 1, wherein forming said work-function material comprises forming at least one material layer having an intrinsic internal stress.

4. (canceled)

7-12. -12. (canceled)

15. A method for forming a replacement gate structure of a semiconductor device, the method comprising:

forming a sacrificial gate structure above a semiconductor layer of said semiconductor device;

forming a gate cavity by selectively removing said sacrificial gate structure from above said semiconductor layer;

partially filling said gate cavity by forming at least one layer of a metal gate electrode work-function material in said gate cavity; and

filling a remaining portion of said gate cavity with a conductive metal fill material by performing a physical vapor deposition process at a temperature below approximately 450°

C.

16. The method of claim 15, wherein said physical vapor deposition process is performed at a temperature in the range of approximately 400-420°

C.

17. The method of claim 15, wherein said physical vapor deposition process is performed at a temperature below approximately 400°

C.

18. The method of claim 15, wherein filling a remaining portion of said gate cavity with said conductive metal fill material comprises depositing an aluminum-germanium material alloy having a germanium content of less than approximately 5% atomic weight inside said remaining portion of said gate cavity and above said at least one layer of metal gate electrode work-function material.

19. The method of claim 15, wherein forming said at least one layer of metal gate electrode work-function comprising forming said at least one layer of metal gate electrode work-function material with an intrinsic internal stress level.

24. The method of claim 15, wherein said physical vapor deposition process is performed at a temperature in the range of approximately 400-420°

C.

25. The method of claim 15, wherein said physical vapor deposition process is performed at a temperature below approximately 400°

C.

20-22. -22. (canceled)

23. A method for forming a replacement gate structure of a semiconductor device, the method comprising:

forming a sacrificial gate structure above a semiconductor layer of said semiconductor device;

forming a gate cavity by selectively removing said sacrificial gate structure from above said semiconductor layer;

partially filling said gate cavity by forming at least one layer of a metal gate electrode work-function material having an intrinsic internal stress level in said gate cavity; and

performing a physical vapor deposition process at a temperature below approximately 450°

C. to fill a remaining portion of said gate cavity with a conductive metal fill material by depositing an aluminum-germanium material alloy having a germanium content of less than approximately 5% atomic weight above said at least one layer of metal gate electrode work-function material.