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MANUFACTURING APPARATUS OF SiC SINGLE CRYSTAL, JIG FOR USE IN THE MANUFACTURING APPARATUS, AND METHOD FOR MANUFACTURING SiC SINGLE CRYSTAL

  • US 20130305981A1
  • Filed: 12/26/2011
  • Published: 11/21/2013
  • Est. Priority Date: 12/27/2010
  • Status: Active Grant
First Claim
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1. A manufacturing apparatus of a SiC single crystal, comprising:

  • a chamber capable of accommodating a crucible for housing a SiC solution;

    a vertical seed shaft which has a lower end surface to which a SiC seed crystal can be attached; and

    a cover member which is a housing having an open lower end and can be housed in the crucible, wherein a lower end portion of the seed shaft is disposed inside the cover member.

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