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METHOD AND APPARATUS FOR ENHANCING SIGNAL STRENGTH FOR IMPROVED GENERATION AND PLACEMENT OF MODEL-BASED SUB-RESOLUTION ASSIST FEATURES (MB-SRAF)

  • US 20130311960A1
  • Filed: 05/13/2013
  • Published: 11/21/2013
  • Est. Priority Date: 01/14/2010
  • Status: Active Grant
First Claim
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1. A method for enhancing signal strength for placing sub-resolution assist features (“

  • SRAF”

    ) with respect to one or more target patterns in a mask layout, comprising;

    generating an initial SRAF guidance map for the mask layout;

    placing a first set of one or more SRAF in the mask layout according to the initial SRAF guidance map;

    altering one or more of number, location and dimension of at least a portion of the first set of one or more SRAFs;

    measuring improvement in signal strength in the initial SRAF guidance map; and

    generating an updated SRAF guidance map with enhanced signal strength.

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