SENSOR SYSTEM COMPOSED OF ROTATION-RATE SENSOR AND A SENSOR CONTROLLING IT
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Abstract
A rotational rate sensor is provided having a substrate and having a seismic mass that is movable relative to the substrate, the seismic mass being capable of being excited by a drive unit to a working oscillation relative to the substrate, and a Coriolis deflection of the seismic mass perpendicular to the working oscillation being capable of being detected, the rotational rate sensor having an interface for sending out a sensor signal as a function of the Coriolis deflection, the drive unit being configured for the modification of a frequency and/or of an amplitude of the working oscillation when a control signal is present at the interface.
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Citations
20 Claims
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1-10. -10. (canceled)
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11. A rotational rate sensor, comprising:
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a substrate; a seismic mass that is movable relative to the substrate; a drive unit, the seismic mass being capable of being excited by the drive unit to a working oscillation relative to the substrate, and a Coriolis deflection of the seismic mass perpendicular to the working oscillation being capable of being detected; and an interface to send out a sensor signal as a function of the Coriolis deflection; wherein the drive unit is configured to modify at least one of a frequency and an amplitude of the working oscillation, when a control signal is present at the interface. - View Dependent Claims (12)
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13. A sensor system, comprising:
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a rotational rate sensor including a substrate, a seismic mass that is movable relative to the substrate, a drive unit, the seismic mass being capable of being excited by the drive unit to a working oscillation relative to the substrate, and a Coriolis deflection of the seismic mass perpendicular to the working oscillation being capable of being detected, and an interface to send out a sensor signal as a function of the Coriolis deflection, wherein the drive unit is configured to modify at least one of a frequency and an amplitude of the working oscillation, when a control signal is present at the interface; and a sensor, the rotational rate sensor being coupled to the sensor via the interface, the sensor being configured to output the control signal via the interface as a function of a sensor signal. - View Dependent Claims (14, 15)
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16. A method for operating a rotational rate sensor, the rotational rate sensor including a substrate, a seismic mass that is movable relative to the substrate, a drive unit, the seismic mass being capable of being excited by the drive unit to a working oscillation relative to the substrate, and a Coriolis deflection of the seismic mass perpendicular to the working oscillation being capable of being detected, and an interface to send out a sensor signal as a function of the Coriolis deflection, wherein the drive unit is configured to modify at least one of a frequency and an amplitude of the working oscillation, when a control signal is present at the interface, the method comprising:
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exciting a seismic mass to a working oscillation by a drive unit; detecting a Coriolis deflection of the seismic mass perpendicular to the working oscillation; and modifying at least one of a frequency and amplitude of the working oscillation when a control signal is detected at an interface configured to send out a sensor signal as a function of the Coriolis deflection. - View Dependent Claims (17, 18)
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19. A method for operating a sensor system having a rotational rate sensor and a sensor, wherein the rotational rate sensor includes a substrate, a seismic mass that is movable relative to the substrate, a drive unit, the seismic mass being capable of being excited by the drive unit to a working oscillation relative to the substrate, and a Coriolis deflection of the seismic mass perpendicular to the working oscillation being capable of being detected, and an interface to send out a sensor signal as a function of the Coriolis deflection, wherein the drive unit is configured to modify at least one of a frequency and an amplitude of the working oscillation, when a control signal is present at the interface, the method comprising:
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exciting a seismic mass to a working oscillation by a drive unit; detecting a Coriolis deflection of the seismic mass perpendicular to the working oscillation; modifying at least one of a frequency and amplitude of the working oscillation when a control signal is detected at an interface configured to send out a sensor signal as a function of the Coriolis deflection; and producing the control signal by the sensor. - View Dependent Claims (20)
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Specification