SUBSTRATE-BONDING APPARATUS FOR DISPLAY DEVICE AND METHOD FOR MANUFACTURING BONDED SUBSTRATE
First Claim
1. A substrate-bonding apparatus for a display device, the apparatus comprising:
- a chamber unit configured to bond a carrier substrate to a substrate for manufacturing the display device;
a first surface plate provided inside the chamber unit and configured to support the substrate;
a supporting unit provided inside the chamber unit and configured bring the carrier substrate into contact with the substrate supported by the first surface plate; and
a pressure-adjusting unit communicating with the chamber unit and configured to change a vacuum pressure from a low vacuum pressure to a high pressure in multiple steps inside the chamber unit while the carrier substrate is brought into contact with the substrate to bond the carrier substrate to the substrate without adhesive material between the carrier substrate and the substrate.
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Accused Products
Abstract
A substrate-bonding apparatus for a display device, and which includes a chamber unit configured to bond a carrier substrate to a substrate for manufacturing the display device; a first surface plate provided inside the chamber unit and configured to support the substrate; a supporting unit provided inside the chamber unit and configured bring the carrier substrate into contact with the substrate supported by the first surface plate; and a pressure-adjusting unit communicating with the chamber unit and configured to change a vacuum pressure from a low vacuum pressure to a high pressure in multiple steps inside the chamber unit while the carrier substrate is brought into contact with the substrate to bond the carrier substrate to the substrate without adhesive material between the carrier substrate and the substrate.
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Citations
20 Claims
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1. A substrate-bonding apparatus for a display device, the apparatus comprising:
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a chamber unit configured to bond a carrier substrate to a substrate for manufacturing the display device; a first surface plate provided inside the chamber unit and configured to support the substrate; a supporting unit provided inside the chamber unit and configured bring the carrier substrate into contact with the substrate supported by the first surface plate; and a pressure-adjusting unit communicating with the chamber unit and configured to change a vacuum pressure from a low vacuum pressure to a high pressure in multiple steps inside the chamber unit while the carrier substrate is brought into contact with the substrate to bond the carrier substrate to the substrate without adhesive material between the carrier substrate and the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of bonding a carrier substrate and a substrate for a display device, the method comprising:
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supporting, via a first surface plate provided inside the chamber unit, the substrate; bringing, via using a supporting unit provided inside the chamber unit, the carrier substrate into contact with the substrate supported by the first surface plate; and changing, via a pressure-adjusting unit communicating with the chamber unit, a vacuum pressure from a low vacuum pressure to a high pressure in multiple steps inside the chamber unit while the carrier substrate is brought into contact with the substrate to bond the carrier substrate to the substrate without adhesive material between the carrier substrate and the substrate. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification