THIN SUBSTRATE ELECTROSTATIC CHUCK SYSTEM AND METHOD
First Claim
Patent Images
1. A processing system, comprising:
- an electrostatic chuck for holding a semiconductor substrate attached to an electrically insulating carrier, wherein the electrically insulating carrier is disposed between the electrostatic chuck and the semiconductor substrate;
an AC power supply electrically coupled to the electrostatic chuck;
wherein the supplied voltage is dependent on at least one property of the electrically insulating carrier.
1 Assignment
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Accused Products
Abstract
In various aspects of the disclosure, a semiconductor substrate processing system may include an electrostatic chuck for holding a semiconductor substrate attached to an electrically insulating carrier; and an AC power supply electrically coupled to the electrostatic chuck.
11 Citations
34 Claims
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1. A processing system, comprising:
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an electrostatic chuck for holding a semiconductor substrate attached to an electrically insulating carrier, wherein the electrically insulating carrier is disposed between the electrostatic chuck and the semiconductor substrate; an AC power supply electrically coupled to the electrostatic chuck; wherein the supplied voltage is dependent on at least one property of the electrically insulating carrier. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A processing system, comprising:
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an electrostatic chuck for holding a semiconductor substrate attached to an electrically insulating carrier, wherein the electrically insulating carrier is disposed between the electrostatic chuck and the semiconductor substrate; an AC power supply electrically coupled to the electrostatic chuck wherein the AC power supply provides a voltage of at least 500 V peak to peak. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method of manufacturing a device, the method comprising:
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providing a semiconductor substrate; attaching the semiconductor substrate to an electrically insulating carrier; supporting the semiconductor substrate and electrically insulating carrier with an electrostatic chuck, the electrically insulating carrier being disposed between the electrostatic chuck and the semiconductor substrate; wherein a voltage supplied to the electrostatic chuck is related to at least one property of the electrically insulating carrier. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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Specification