Apparatus for CVD and ALD with an Elongate Nozzle and Methods Of Use
First Claim
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1. A deposition system comprising:
- a processing chamber;
a gas inlet to provide a first gas at a first pressure to the processing chamber;
a substrate support disposed within the processing chamber to support a substrate; and
an elongate nozzle to provide a second gas at a second pressure to the processing chamber, wherein the elongate nozzle is adjacent the substrate support, the second pressure is higher than the first pressure, and at least one of the elongate nozzle and the substrate support is movable relative to the other one of the elongate nozzle and the substrate support.
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Abstract
Provided are atomic layer deposition apparatus and methods including a processing chamber with a substrate support at least one elongate nozzle movable relative to the substrate support. The processing chamber has a first gas at a first pressure and a second gas is provided from the elongate nozzle at a second pressure greater than the first pressure.
22 Citations
20 Claims
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1. A deposition system comprising:
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a processing chamber; a gas inlet to provide a first gas at a first pressure to the processing chamber; a substrate support disposed within the processing chamber to support a substrate; and an elongate nozzle to provide a second gas at a second pressure to the processing chamber, wherein the elongate nozzle is adjacent the substrate support, the second pressure is higher than the first pressure, and at least one of the elongate nozzle and the substrate support is movable relative to the other one of the elongate nozzle and the substrate support. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. An atomic layer deposition system comprising:
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a processing chamber; a gas inlet to provide a first gas at a first pressure to the processing chamber; a substrate support disposed within the processing chamber to support a substrate in a substantially fixed position; a first elongate nozzle to provide a second gas at a second pressure toward the substrate support in the processing chamber, the first elongate nozzle movable relative to the substrate support, the second pressure higher than the first pressure; and a second elongate nozzle to provide a third gas toward the substrate support in the processing chamber, the second elongate nozzle independently movable relative to the substrate support and the first elongate nozzle.
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17. A method of processing a substrate in a processing chamber, the method comprising:
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supporting the substrate on a substrate support; exposing the substrate to a first gas in the processing chamber; and moving a first elongate nozzle relative to and above the substrate support, the first elongate nozzle providing a second gas to the processing chamber toward the substrate, wherein the first elongate nozzle moves reciprocally relative to the substrate so that portions of the substrate under the first elongate nozzle are exposed to the second gas and portions of the substrate not under the first elongate nozzle are exposed to the first gas. - View Dependent Claims (18, 19, 20)
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Specification