Ceramic Pressure Measuring Cell
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Abstract
A pressure measuring cell includes at least one ceramic measuring membrane body; and at least one ceramic platform, wherein the measuring membrane body is connected with the platform along an annular, peripheral joint. The joint is formed as a welded connection between the measuring membrane body and the platform, wherein the measuring membrane body has a pressure-dependently deformable measuring membrane. A pressure sensor includes a pressure measuring cell and a housing, wherein the pressure measuring cell is held by the housing, and wherein the pressure measuring cell closes a housing opening, through which the pressure measuring cell communicates with an environment of the housing. A seal is clamped between a sealing surface surrounding the opening of the housing and a sealing surface of the pressure measuring cell.
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Citations
26 Claims
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1-13. -13. (canceled)
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14. A pressure measuring cell, comprising:
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at least one ceramic measuring membrane body, wherein the measuring membrane body has a pressure-dependently deformable measuring membrane; and at least one ceramic platform, wherein said measuring membrane body is connected with said platform along an annular, peripheral joint, wherein; said peripheral joint is formed as a welded connection between said measuring membrane body and the said platform. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. The pressure sensor, comprising:
- at least one ceramic measuring membrane body, wherein the measuring membrane body has a pressure-dependently deformable measuring membrane; and
at least one ceramic platform, wherein said measuring membrane body is connected with said platform along an annular, peripheral joint, wherein;
said peripheral joint is formed as a welded connection between said measuring membrane body and the said platform; and
a housing, wherein;said pressure measuring cell is held by said housing; said pressure measuring cell closes a housing opening, through which said pressure measuring cell communicates with an environment of said housing; a seal is clamped between a sealing surface surrounding said opening of said housing and a sealing surface of said pressure measuring cell.
- at least one ceramic measuring membrane body, wherein the measuring membrane body has a pressure-dependently deformable measuring membrane; and
Specification