OPTOELECTRONIC DEVICE AND METHOD FOR MANUFACTURING THE SAME
First Claim
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1. An optoelectronic device comprising:
- a substrate; and
an epitaxial stack including a first semiconductor layer having a first conductivity-type impurity, an active layer, and a second semiconductor layer having a second conductivity-type impurity formed in sequence on the substrate;
a hollow component formed inside the active layer or the second semiconductor layer, wherein the layer with the hollow component is doped with an additional impurity.
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Abstract
An optoelectronic device comprising: a substrate; and an epitaxial stack including a first semiconductor layer having a first conductivity-type impurity, an active layer, and a second semiconductor layer having a second conductivity-type impurity formed in sequence on the substrate; a hollow component formed inside the active layer or the second semiconductor layer, wherein the layer with the hollow component is doped with an additional impurity.
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Citations
20 Claims
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1. An optoelectronic device comprising:
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a substrate; and an epitaxial stack including a first semiconductor layer having a first conductivity-type impurity, an active layer, and a second semiconductor layer having a second conductivity-type impurity formed in sequence on the substrate; a hollow component formed inside the active layer or the second semiconductor layer, wherein the layer with the hollow component is doped with an additional impurity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of fabricating an optoelectronic device, comprising:
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providing a substrate; forming a first semiconductor layer having a first conductivity-type impurity on the substrate; forming an active layer on the first semiconductor layer; forming a second semiconductor layer having a second conductivity-type impurity; doping an additional impurity into at least one of the second semiconductor layer and the active layer; and forming a hollow component inside the second semiconductor layer and/or the active layer. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification