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MULTILAYER MICROFLUIDIC PROBE HEAD WITH IMMERSION CHANNELS AND FABRICATION THEREOF

  • US 20130333761A1
  • Filed: 10/18/2011
  • Published: 12/19/2013
  • Est. Priority Date: 10/29/2010
  • Status: Active Grant
First Claim
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1. A microfluidic probe head with a base layer comprising:

  • a processing liquid microchannel in fluid communication with a processing liquid aperture on a face of the base layer; and

    an immersion liquid microchannel in fluid communication with a immersion liquid aperture on a face of the base layer,wherein the microfluidic probe head is configured to allow, in operation, processing liquid provided through the processing liquid aperture to combine with immersion liquid provided through the immersion liquid aperture.

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