ELECTRONIC COMPONENT
1 Assignment
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Accused Products
Abstract
An electronic component includes a support layer that surrounds an element region on a principal surface of a piezoelectric substrate, when viewed in plan from a z-axis direction. A surface acoustic wave element is provided in the element region. A cover layer is provided on the support layer, and is opposed to the principal surface. A pillar member connects the principal surface and the cover layer in a space surrounded by the principal surface, the support layer, and the cover layer, and does not contact with the support layer.
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Citations
21 Claims
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1. (canceled)
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2. An electronic component comprising:
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a substrate; a support layer that surrounds a predetermined region on a principal surface of the substrate, when viewed in plan from a normal direction of the principal surface; a surface acoustic wave element provided in the predetermined region; a cover layer provided on the support layer and opposed to the principal surface; and a pillar member that connects the principal surface and the cover layer in a space surrounded by the principal surface, the support layer, and the cover layer and that does not contact with the support layer. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification