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SENSOR AND A SENSOR SYSTEM

  • US 20130336095A1
  • Filed: 12/07/2011
  • Published: 12/19/2013
  • Est. Priority Date: 12/20/2010
  • Status: Active Grant
First Claim
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1. A wireless sensor which comprises;

  • an electrostatically actuated ultrasound transmitter loaded with a fluid-filled cavity, andan antenna or a coupling element matched to the ultrasound transmitter.

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