SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR DETECTION OF DEFECTS WITHIN INSPECTION IMAGES
First Claim
1. An analysis system for detection of defects within an inspection image of an inspected object, the inspection image comprising a plurality of pixels, the system comprising:
- a computerized anchor processing module configured to obtain multiple anchor locations with respect to the inspection image;
a computerized segmentation module operatively coupled to the computerized anchor processing module, configured to segmentize the inspection image based on the multiple anchor locations and on a mask which defines multiple mask-segments, by assigning each part out of multiple parts of the inspection image to a respective image-segment selected out of a multiple image segments, wherein the multiple image segments correspond to at least one mask-segment of said multiple mask-segments; and
a defect detection processor operatively coupled to the computerized segmentation module, configured to determine a presence of a defect in the inspection image based on the segmentation at least by assessing each pixel out of a plurality of pixels of the inspection image based on;
(a) a result of a comparison of the pixel to correlative data of a reference image, and (b) a decision rule which depends on the image-segment selected for the pixel.
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Abstract
An analysis system for detection of defects within an inspection image of an inspected object, the inspection image comprising a plurality of pixels, the system including: a computerized segmentation module configured to segmentize the inspection image based on multiple anchor locations and on a mask which defines multiple mask-segments, by assigning each part out of multiple parts of the inspection image to a respective image-segment selected out of a multiple image segments, wherein the multiple image segments correspond to at least one mask-segment of said multiple mask-segments; and a defect detection processor configured to determine a presence of a defect in the inspection image based on the segmentation at least by assessing each pixel out of a plurality of pixels of the inspection image.
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Citations
20 Claims
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1. An analysis system for detection of defects within an inspection image of an inspected object, the inspection image comprising a plurality of pixels, the system comprising:
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a computerized anchor processing module configured to obtain multiple anchor locations with respect to the inspection image; a computerized segmentation module operatively coupled to the computerized anchor processing module, configured to segmentize the inspection image based on the multiple anchor locations and on a mask which defines multiple mask-segments, by assigning each part out of multiple parts of the inspection image to a respective image-segment selected out of a multiple image segments, wherein the multiple image segments correspond to at least one mask-segment of said multiple mask-segments; and a defect detection processor operatively coupled to the computerized segmentation module, configured to determine a presence of a defect in the inspection image based on the segmentation at least by assessing each pixel out of a plurality of pixels of the inspection image based on;
(a) a result of a comparison of the pixel to correlative data of a reference image, and (b) a decision rule which depends on the image-segment selected for the pixel. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A computerized method for detection of defects within an inspection image of an inspected object, the image comprising a plurality of pixels, the method comprising:
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obtaining multiple anchor locations with respect to the inspection image; based on the multiple anchor locations and on a mask which defines multiple mask-segments, segmentizing the inspection image by assigning each part out of multiple parts of the inspection image to a respective image-segment selected out of a multiple image-segments, wherein the multiple image-segments correspond to at least one mask-segment of said multiple mask-segments; and determining a presence of a defect in the inspection image based on the segmentation, the determining of the presence of the defect comprises; for each pixel out of a plurality of pixels of the inspection image, assessing the pixel based on;
(a) a result of a comparison of the pixel to correlative data of a reference image, and (b) a decision rule which depends on the image-segment selected for the pixel. - View Dependent Claims (14, 15, 16)
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17. A computer readable storage medium including instructions that, when executed by a processing system, cause the processing system to perform a method for classifying a potential defect identified within an inspection image of an inspected object, the method comprising:
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obtaining multiple anchor locations with respect to the inspection image; based on the multiple anchor locations and on a mask which defines multiple mask-segments, segmentizing the inspection image by assigning each part out of multiple parts of the inspection image to a respective image-segment selected out of a multiple image-segments, wherein the multiple image-segments correspond to at least one mask-segment of said multiple mask-segments; and determining a presence of a defect in the inspection image based on the segmentation, the determining of the presence of the defect comprises; for each pixel out of a plurality of pixels of the inspection image, assessing the pixel based on;
(a) a result of a comparison of the pixel to correlative data of a reference image, and (b) a decision rule which depends on the image-segment selected for the pixel. - View Dependent Claims (18, 19, 20)
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Specification