TUNING BAR PIEZOELECTRIC VIBRATOR AND TUNING FORK PIEZOELECTRIC VIBRATOR

• US 20130340523A1
• Filed: 06/14/2013
• Published: 12/26/2013
• Est. Priority Date: 12/16/2010
• Status: Abandoned Application

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: KURAKAWA, Haruyoshi
• Application Number:
  US13/917,709
• Publication Number:
  US 20130340523A1
• Time in Patent Office: Days
• US Class Current: 73/504.16
• CPC Class Codes: G01C 19/5607 using vibrating tuning forks double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719
• CPC Class Codes: G01C 19/5642 using vibrating bars or beams
• CPC Class Codes: H03H 9/21 Crystal tuning forks
• CPC Class Codes: H03H 9/583 comprising a plurality of piezoelectric layers acoustically coupled
• CPC Class Codes: H10N 30/40 with electrical input and electrical output, e.g. functioning as transformers
• CPC Class Codes: H10N 30/87 Electrodes or interconnections, e.g. leads or terminals

Abstract

A tuning bar piezoelectric vibrator includes first and second leg portions defined by a tuning bar piezoelectric vibrator, layers of first and second inner driver electrodes arranged as inner driver electrodes between first and second piezoelectric layers that are polarized in opposite directions of a thickness direction, a first outer electrode and a second outer electrode arranged to face the first and the second inner driver electrodes with the piezoelectric layers in between, respectively, and first and second vibrator portions in which the inner driver electrodes are used as driver electrodes.

Claims

1. A tuning bar piezoelectric vibrator comprising:

a first piezoelectric layer polarized in a thickness direction;

a second piezoelectric layer polarized in a direction opposite to the first piezoelectric layer in the thickness direction, the second piezoelectric layer being stacked on the first piezoelectric layer;

a first inner driver electrode and a second inner driver electrode located between the first and second piezoelectric layers, the first inner driver electrode and the second inner driver electrode being separated from each other in a plane direction of an interface between the first and second piezoelectric layers;

a first outer electrode located on an outer surface of the first piezoelectric layer so as to face the inner driver electrode over the first piezoelectric layer; and

a second outer electrode located on an outer surface of the second piezoelectric layer so as to face the inner driver electrode over the second piezoelectric layer.

2. The tuning bar piezoelectric vibrator according to claim 1, wherein the first inner driver electrode and the second inner driver electrode are arranged at different positions in a direction perpendicular or substantially perpendicular to the interface.

3. The tuning bar piezoelectric vibrator according to claim 1, further comprising a characteristic adjustment layer located on at least one of outer sides of the first and second outer electrodes, the characteristic adjustment layer being made of a material different from or a same as that of the first and second piezoelectric layers.

4. The tuning bar piezoelectric vibrator according to claim 1, further comprising:

a first conduction member;

wherein

a groove is arranged so as to extend in the thickness direction of the second piezoelectric layer and penetrate through at least the second piezoelectric layer;

the second piezoelectric layer is divided into a first division piezoelectric layer portion and a second division piezoelectric layer portion by the groove;

the second outer electrode includes a first division outer electrode and a second division outer electrode provided on outer surfaces of the first division piezoelectric layer portion and the second division piezoelectric layer portion; and

the first conduction member defines a conduction path between the first division outer electrode and the second division outer electrode.

5. The tuning bar piezoelectric vibrator according to claim 4, further comprising:

a second conduction member;

wherein

the groove is arranged so as to penetrate through the first and second piezoelectric layers;

the first piezoelectric layer is divided into a third division piezoelectric layer portion and a fourth division piezoelectric layer portion by the groove;

the groove includes a jointing material layer that joins the first division piezoelectric layer portion and the third division piezoelectric layer portion to the second division piezoelectric layer portion and the fourth division piezoelectric layer portion;

the first outer electrode is divided into a third division outer electrode and a fourth division outer electrode with the groove in between; and

the second conduction member is arranged to provide an electrical contact between the third and fourth division outer electrodes.

6. A tuning fork piezoelectric vibrator having a tuning fork shape, comprising:

a first leg portion and a second leg portion extending in a length direction, the first leg portion and the second leg portion facing each other along a groove; and

a base portion connected to first ends of the first leg portion and the second leg portion;

wherein

a structure including the first leg portion and the second leg portion is defined by tuning bar piezoelectric vibrators, at least one of which is the tuning bar piezoelectric vibrator according to claim 1.

7. The tuning fork piezoelectric vibrator according to claim 6, wherein the first leg portion and the second leg portion are each defined by the tuning bar piezoelectric vibrator according to claim 1.

8. The tuning fork piezoelectric vibrator according to claim 6, wherein

the tuning bar piezoelectric vibrator further includes a first conduction member;

wherein

the groove is arranged so as to extend in the thickness direction of the second piezoelectric layer and penetrate through at least the second piezoelectric layer;

the second piezoelectric layer is divided into a first division piezoelectric layer portion and a second division piezoelectric layer portion by the groove;

the second outer electrode includes a first division outer electrode and a second division outer electrode located on outer surfaces of the first division piezoelectric layer portion and the second division piezoelectric layer portion;

the first conduction member defines a conduction path between the first division outer electrode and the second division outer electrode;

the first leg portion includes the first division piezoelectric layer portion and the first division outer electrode located on one side of the groove; and

the second leg portion includes the second division piezoelectric layer portion and the second division outer electrode located on the other side of the groove;

the first and second leg portions are made of a single piece of the tuning bar piezoelectric vibrator.

9. The tuning fork piezoelectric vibrator according to claim 7, further comprising:

a second conduction member;

wherein

the groove is arranged so as to penetrate through the first and second piezoelectric layers;

the first piezoelectric layer is divided into a third division piezoelectric layer portion and a fourth division piezoelectric layer portion by the groove;

the groove includes a jointing material layer that joins the first division piezoelectric layer portion and the third division piezoelectric layer portion to the second division piezoelectric layer portion and the fourth division piezoelectric layer portion;

the first outer electrode is divided into a third division outer electrode and a fourth division outer electrode with the groove in between; and

the second conduction member is arranged to provide an electrical contact between the third and fourth division outer electrodes.

10. The tuning fork piezoelectric vibrator according to claim 6, wherein:

the tuning fork piezoelectric vibrator is for use in a gyroscope module to detect a rotational angular velocity;

the inner driver electrode is a driver electrode; and

at least one of the first and second outer electrodes is a detector electrode.

11. The tuning bar piezoelectric vibrator according to claim 1, wherein:

the tuning bar piezoelectric vibrator is for use in a gyroscope module to detect a rotational angular velocity;

the inner driver electrode is a driver electrode; and

at least one of the first and second outer electrodes is a detector electrode.

12. The tuning bar piezoelectric vibrator according to claim 1, further comprising a piezoelectric body having an elongated strip shape.

13. The tuning bar piezoelectric vibrator according to claim 12, wherein the first and second inner driver electrodes are exposed at an outer surface of the piezoelectric body.

14. The tuning bar piezoelectric vibrator according to claim 12, wherein the first and second outer electrodes are arranged so as to cover entire areas of a top surface and a bottom surface of the piezoelectric body.

15. The tuning bar piezoelectric vibrator according to claim 1, wherein the first inner driver electrode and the second inner driver electrode are arranged to receive different electric potentials.

16. The tuning bar piezoelectric vibrator according to claim 12, wherein the piezoelectric body includes a plurality of piezoelectric green sheets stacked on each other.

17. The tuning bar piezoelectric vibrator according to claim 16, wherein the first inner driver electrode and the second inner driver electrode are located on different ones of the plurality of piezoelectric green sheets.

18. The tuning bar piezoelectric vibrator according to claim 1, wherein the first and second piezoelectric layers have different thicknesses in a first vibrator portion and a second vibrator portion.

19. A gyroscope module to detect a rotational angular velocity comprising the tuning bar piezoelectric vibrator of claim 1.

20. A gyroscope module to detect a rotational angular velocity comprising the tuning fork piezoelectric vibrator of claim 6.