SOLID-STATE IMAGING DEVICE
First Claim
1. A solid-state imaging device comprising:
- a substrate;
a plurality of first electrodes arranged in a matrix above the substrate, and electrically isolated from each other;
an insulator layer covering the first electrodes, having a planarized upper surface, and comprising an insulator;
a photoelectric conversion film formed above the insulator layer, the photoelectric conversion film converting light into signal charges;
a second electrode formed above the photoelectric conversion film; and
a signal readout circuit formed on the substrate, the signal readout circuit generating a readout signal by detecting an amount of current change or voltage change caused by the signal charges at each of the first electrodes,wherein the insulator layer allows conduction of at least electrons or holes by quantum mechanical tunneling.
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Accused Products
Abstract
A solid-state imaging device includes: a substrate; a plurality of first electrodes arranged in a matrix above the substrate, and electrically isolated from each other; an insulator layer covering the first electrodes, having a planarized upper surface, and comprising an insulator; a photoelectric conversion film which is formed above the insulator layer, and converts light into signal charges; a second electrode formed above the photoelectric conversion film; and a signal readout circuit which is formed on the substrate, and generates a readout signal by detecting an amount of current change or voltage change caused by the signal charges at each of the first electrodes, in which the insulator layer allows conduction of at least electrons or holes by quantum mechanical tunneling.
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Citations
13 Claims
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1. A solid-state imaging device comprising:
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a substrate; a plurality of first electrodes arranged in a matrix above the substrate, and electrically isolated from each other; an insulator layer covering the first electrodes, having a planarized upper surface, and comprising an insulator; a photoelectric conversion film formed above the insulator layer, the photoelectric conversion film converting light into signal charges; a second electrode formed above the photoelectric conversion film; and a signal readout circuit formed on the substrate, the signal readout circuit generating a readout signal by detecting an amount of current change or voltage change caused by the signal charges at each of the first electrodes, wherein the insulator layer allows conduction of at least electrons or holes by quantum mechanical tunneling. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification