PACKAGING TO REDUCE STRESS ON MICROELECTROMECHANICAL SYSTEMS
First Claim
Patent Images
1. An apparatus, comprising:
- an integrated circuit including at least one electrical interconnect disposed on an elongate arm extending away from a main portion of the integrated circuit , with a gap between the main portion and one side the elongate arm; and
a microelectromechanical layer including an oscillating portion, the microelectromechanical layer coupled to the main portion of the integrated circuit.
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Abstract
One example includes an integrated circuit including at least one electrical interconnects disposed on an elongate are extending away from a main portion of the integrated circuit and a microelectromechanical layer including an oscillating portion, the microelectromechanical layer coupled to the main portion of the integrated circuit.
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Citations
15 Claims
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1. An apparatus, comprising:
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an integrated circuit including at least one electrical interconnect disposed on an elongate arm extending away from a main portion of the integrated circuit , with a gap between the main portion and one side the elongate arm; and a microelectromechanical layer including an oscillating portion, the microelectromechanical layer coupled to the main portion of the integrated circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method, comprising:
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forming an integrated circuit; forming the integrated circuit to define a plurality of elongate arms that extend away from a main portion of the integrated circuit to which the microelectromechanical layer is coupled; stacking the integrated circuit onto a substrate and electrically and physically coupling the integrated circuit to the substrate using a plurality of electrical interconnects, wherein electrically and physically coupling the integrated circuit to the substrate using a plurality of electrical interconnects includes electrically and physically coupling the integrated circuit to the substrate using the plurality of elongate arms; stacking a microelectromechanical layer onto the integrated circuit and electrically and physically coupling the microelectromechanical layer to the integrated circuit such that the microelectromechanical layer is electrically coupled to the substrate via a circuit of the integrated circuit. - View Dependent Claims (12, 13, 14, 15)
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Specification