ENCAPSULATION OF AN MEMS COMPONENT AND A METHOD FOR PRODUCING SAID COMPONENT
First Claim
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1. A component comprising:
- a substrate;
a chip;
a frame, which is connected to the substrate and on which the chip bears; and
a metallic closure layer, which encompasses the frame, the substrate and the chip such that a volume enclosed by the substrate, the chip and the frame is hermetically sealed.
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Abstract
The invention relates to a component and a method for producing said component. The component comprises a substrate (S), a chip (CH), a frame (MF), which is connected to the substrate (S) and on which the chip (CH) bears. A metallic closure layer (ML) encompasses the frame (MF), the substrate (S) and the chip (CH) such that a volume enclosed by the substrate (S), the chip (CH) and the frame (MF) is hermetically sealed.
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Citations
18 Claims
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1. A component comprising:
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a substrate; a chip; a frame, which is connected to the substrate and on which the chip bears; and a metallic closure layer, which encompasses the frame, the substrate and the chip such that a volume enclosed by the substrate, the chip and the frame is hermetically sealed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for producing a component comprising a substrate, a chip and a frame, comprising the following steps:
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applying the frame to the substrate; connecting the chip to the frame by placing the chip onto the frame; and hermetically sealing a volume enclosed by the substrate, the chip and the frame by means of a metallic closure layer. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification