OPTICAL PARTICLE DETECTING DEVICE AND PARTICLE DETECTING METHOD
First Claim
Patent Images
1. :
- An optical particle detecting device comprising;
a light source that emits an inspection light;
a converting unit that converts the inspection light into collimated light;
a focusing reflecting mirror that reflects toward a focal point the inspection light that has been converted into collimated light;
a jet mechanism that causes an airstream including a particle to jet into the focal point of the focusing reflecting mirror; and
a detecting portion that detects either scattered light or fluorescence produced by the particle included in the airstream being illuminated by the inspection light.
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Abstract
An optical particle detecting device including a light source that emits an inspection light, a converting unit that converts the inspection light into collimated light, a focusing reflecting mirror that reflects toward a focal point the inspection light that has been converted into collimated light, a jet mechanism that causes an airstream including a particle to jet into the focal point of the focusing reflecting mirror, and a detecting portion that detects either scattered light or fluorescence produced by the particle included in the airstream being illuminated by the inspection light.
11 Citations
16 Claims
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1. :
- An optical particle detecting device comprising;
a light source that emits an inspection light; a converting unit that converts the inspection light into collimated light; a focusing reflecting mirror that reflects toward a focal point the inspection light that has been converted into collimated light; a jet mechanism that causes an airstream including a particle to jet into the focal point of the focusing reflecting mirror; and a detecting portion that detects either scattered light or fluorescence produced by the particle included in the airstream being illuminated by the inspection light. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
- An optical particle detecting device comprising;
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9. :
- A particle detecting method, comprising;
emitting an inspection light; converting, by a converting unit, the inspection light into collimated light; reflecting, by a focusing reflecting mirror having a focal point, the inspection light that has been converted into collimated light toward a focal point; jetting an airstream including a particle into the focal point of the focusing reflecting mirror; and detecting scattered light or fluorescence produced by the particle included in the airstream being illuminated by the inspection light. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
- A particle detecting method, comprising;
Specification