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OPTICAL PARTICLE DETECTING DEVICE AND PARTICLE DETECTING METHOD

  • US 20130342838A1
  • Filed: 06/21/2013
  • Published: 12/26/2013
  • Est. Priority Date: 06/22/2012
  • Status: Abandoned Application
First Claim
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1. :

  • An optical particle detecting device comprising;

    a light source that emits an inspection light;

    a converting unit that converts the inspection light into collimated light;

    a focusing reflecting mirror that reflects toward a focal point the inspection light that has been converted into collimated light;

    a jet mechanism that causes an airstream including a particle to jet into the focal point of the focusing reflecting mirror; and

    a detecting portion that detects either scattered light or fluorescence produced by the particle included in the airstream being illuminated by the inspection light.

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