LIGHT FOCUSING STRUCTURES FOR FIBER OPTIC COMMUNICATIONS SYSTEMS AND METHODS OF FABRICATING THE SAME USING SEMICONDUCTOR PROCESSING AND MICRO-MACHINING TECHNIQUES
First Claim
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1. A method of fabricating light focusing elements for use in a fiber optic communications system, comprising:
- forming a plurality of light focusing elements on or in a top surface of a substrate;
dicing the substrate to cingulate the light focusing elements.
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Abstract
Methods of fabricating light focusing elements for use in a fiber optic communications system are disclosed in which a plurality of light focusing elements are formed on or in a top surface of a substrate. The substrate is then diced to singulate the light focusing elements.
26 Citations
20 Claims
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1. A method of fabricating light focusing elements for use in a fiber optic communications system, comprising:
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forming a plurality of light focusing elements on or in a top surface of a substrate; dicing the substrate to cingulate the light focusing elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 19, 20)
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12. A wafer, comprising:
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a substrate; a plurality of light focusing elements on an upper surface of the substrate; a plurality of scribe lines that separate the light focusing elements into rows and columns, wherein each light focusing element is configured to focus a large area light field that is incident in a direction that is generally normal to the top surface of the substrate into a smaller area light field. - View Dependent Claims (13, 14)
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15. A method of fabricating light focusing elements for use in a fiber optic communications system, comprising:
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forming a plurality of diffractive patterns on a substrate via at least one of lithography, dry etching, wet etching, laser micromachining or nano-machining to form a plurality of light focusing elements on the substrate; dicing the substrate to singulate the light focusing elements. - View Dependent Claims (16, 17, 18)
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Specification