HEAT TRANSFER SHEET ADHERING APPARATUS AND METHOD

• US 20140008010A1
• Filed: 07/09/2013
• Published: 01/09/2014
• Est. Priority Date: 07/09/2012
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: KITABATA, Toshinori, MATSUMOTO, Kazuya
• Granted Patent: US 9,427,913 B2
• Time in Patent Office: Days
• US Class Current: 156/228
• CPC Class Codes: B29C 65/7841 Holding or clamping means for handling purposes clamping means for the purpose of applying pressure on the parts to be joined, in the area to be joined B29C66/81; work holders in general B25B; devices for holding or positioning work for welding metal B23K37/04
• CPC Class Codes: B29C 66/24221 being circular B29C66/51 takes precedence
• CPC Class Codes: B29C 66/342 Preventing air-inclusions
• CPC Class Codes: B29C 66/345 Progressively making the joint, e.g. starting from the middle B29C66/8341, B29C65/12, B29C65/14, B29C65/16 take precedence
• CPC Class Codes: B29C 66/472 said single elements being substantially flat
• CPC Class Codes: B29C 66/4722 Fixing strips to surfaces other than edge faces fixing strips to edge faces B29C63/0026
• CPC Class Codes: B29C 66/71 characterised by the composition of the plastics material of the parts to be joined welding bar compositions B29C65/125
• CPC Class Codes: B29C 66/742 to metals or their alloys
• CPC Class Codes: B29C 66/7422 Aluminium or alloys of aluminium
• CPC Class Codes: B29C 66/81417 being V-shaped
• CPC Class Codes: B29C 66/81427 comprising a single ridge, e.g. for making a weakening line; comprising a single tooth
• CPC Class Codes: B29C 66/81463 comprising a plurality of single pressing elements, e.g. a plurality of sonotrodes, or comprising a plurality of single counter-pressing elements, e.g. a plurality of anvils, said plurality of said single elements being suitable for making a single joint
• CPC Class Codes: B29C 66/8161 said pressing elements being supported or backed-up by springs or by resilient material
• CPC Class Codes: B29C 66/8223 Worm or spindle mechanisms
• CPC Class Codes: B29C 66/8322 Joining or pressing tools reciprocating along one axis
• CPC Class Codes: B29K 2083/00 Use of polymers having silicon, with or without sulfur, nitrogen, oxygen, or carbon only, in the main chain, as moulding material
• CPC Class Codes: H01L 21/67092 Apparatus for mechanical treatment or grinding or cutting, see the relevant groups in subclasses B24B or B28D
• CPC Class Codes: H01L 21/67132 Apparatus for placing on an insulating substrate, e.g. tape

Abstract

A heat transfer sheet adhering apparatus, for adhering a heat transfer sheet to a ring-shaped member adapted to be used in a substrate processing apparatus, includes a heat transfer sheet mounting part configured to mount the heat transfer sheet thereon; a ring-shaped member supporting part configured to support the ring-shaped member; and a vertically movable pressing part configured to press the ring-shaped member supported by the ring-shaped member supporting part against the heat transfer sheet mounted on the heat transfer sheet mounting part. The pressing part is configured to press the ring-shaped member gradually from an inner peripheral side to an outer peripheral side of the ring-shaped member or from the outer peripheral side to the inner peripheral side of the ring-shaped member.

Claims

1. A heat transfer sheet adhering apparatus for adhering a heat transfer sheet to a ring-shaped member adapted to be used in a substrate processing apparatus, the heat transfer sheet adhering apparatus comprising:

a heat transfer sheet mounting part configured to mount the heat transfer sheet thereon;

a ring-shaped member supporting part configured to support the ring-shaped member; and

a vertically movable pressing part configured to press the ring-shaped member supported by the ring-shaped member supporting part against the heat transfer sheet mounted on the heat transfer sheet mounting part;

wherein the pressing part is configured to press the ring-shaped member gradually from an inner peripheral side to an outer peripheral side of the ring-shaped member or from the outer peripheral side to the inner peripheral side of the ring-shaped member.

2. The apparatus of claim 1, wherein the pressing part comprises:

an upper plate;

a lower plate arranged opposite to the upper plate, the lower plate including a plurality of split plates split in a circumferential direction;

inner peripheral-side biasing bodies each of which is interposed between the upper plate and each of the split plates at an inner peripheral portion of the corresponding split plate and configured to hold the corresponding split plate to the upper plate; and

outer peripheral-side biasing bodies each of which is interposed between the upper plate and each of the split plates at an outer peripheral portion of the corresponding split plate and configured to hold the corresponding split plate to the upper plate, and

wherein the inner peripheral-side biasing body and the outer peripheral-side biasing body for each split plate are configured such that the ring-shaped member is pressed by one of them prior to the other.

3. The apparatus of claim 2, wherein one of the inner peripheral-side biasing body and the outer peripheral-side biasing body for each split plate, which presses the ring-shaped member earlier than the other, has a biasing force smaller than that of the other.

4. The apparatus of claim 1, further comprising:

an exhaust unit configured to depressurize an inside of a housing, wherein the pressing part is operated to adhere the heat transfer sheet to the ring-shaped member in a state where the inside of the housing is maintained by the exhaust unit in a vacuum pressure atmosphere.

5. The apparatus of claim 2, further comprising:

an exhaust unit configured to depressurize an inside of a housing, wherein the pressing part is operated to adhere the heat transfer sheet to the ring-shaped member in a state where the inside of the housing is maintained by the exhaust unit in a vacuum pressure atmosphere.

6. The apparatus of claim 3, further comprising:

an exhaust unit configured to depressurize an inside of a housing, wherein the pressing part is operated to adhere the heat transfer sheet to the ring-shaped member in a state where the inside of the housing is maintained by the exhaust unit in a vacuum pressure atmosphere.

7. The apparatus of claim 1, wherein the ring-shaped member supporting part is provided at one or both of an inner peripheral side and an outer peripheral side of the heat transfer sheet mounting part.

8. The apparatus of claim 2, wherein the ring-shaped member supporting part is provided at one or both of an inner peripheral side and an outer peripheral side of the heat transfer sheet mounting part.

9. The apparatus of claim 3, wherein the ring-shaped member supporting part is provided at one or both of an inner peripheral side and an outer peripheral side of the heat transfer sheet mounting part.

10. The apparatus of claim 4, wherein the ring-shaped member supporting part is provided at one or both of an inner peripheral side and an outer peripheral side of the heat transfer sheet mounting part.

11. The apparatus of claim 5, wherein the ring-shaped member supporting part is provided at one or both of an inner peripheral side and an outer peripheral side of the heat transfer sheet mounting part.

12. The apparatus of claim 6, wherein the ring-shaped member supporting part is provided at one or both of an inner peripheral side and an outer peripheral side of the heat transfer sheet mounting part.

13. A heat transfer sheet adhering method for adhering a heat transfer sheet to a ring-shaped member adapted to be used in a substrate processing apparatus, the method comprising:

pressing the ring-shaped member against the heat transfer sheet mounted on a heat transfer sheet mounting part with a pressing part to adhere the heat transfer sheet to the ring-shaped member, wherein the pressing part gradually presses the ring-shaped member from an inner peripheral side to an outer peripheral side of the ring-shaped member or from the inner peripheral side to the outer peripheral side of the ring-shaped member.

14. The method of claim 13, wherein the pressing part comprises:

an upper plate;

a lower plate arranged opposite to the upper plate, the lower plate including a plurality of split plates split in a circumferential direction;

inner peripheral-side biasing bodies each of which is interposed between the upper plate and each of the split plates at an inner peripheral portion of the corresponding split plate and configured to hold the corresponding split plate to the upper plate; and

outer peripheral-side biasing bodies each of which is interposed between the upper plate and each of the split plates at an outer peripheral portion of the corresponding split plate and configured to hold the corresponding split plate to the upper plate, and

wherein one of the inner peripheral-side biasing body and the outer peripheral-side biasing body for each split plate presses the ring-shaped member prior to the other.

15. The method of claim 14, wherein one of the inner peripheral-side biasing body and the outer peripheral-side biasing body for each split plate, which presses the ring-shaped member earlier than the other, has a biasing force smaller than that of the other.

16. The method of claim 13, wherein the heat transfer sheet is adhered to the ring-shaped member by operating the pressing part at a vacuum pressure atmosphere.

17. The method of claim 14, wherein the heat transfer sheet is adhered to the ring-shaped member by operating the pressing part at a vacuum pressure atmosphere.

18. The method of claim 15, wherein the heat transfer sheet is adhered to the ring-shaped member by operating the pressing part at a vacuum pressure atmosphere.