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RADIATION DETECTION APPARATUS AND METHOD OF MANUFACTURING THE SAME

  • US 20140008749A1
  • Filed: 06/26/2013
  • Published: 01/09/2014
  • Est. Priority Date: 07/04/2012
  • Status: Active Grant
First Claim
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1. A method of manufacturing a radiation detection apparatus, comprising:

  • forming, on a sensor substrate on which a pixel array is formed, a scintillator layer that covers the pixel array, a sealing layer that covers a side face of the scintillator layer, and a protection layer that covers an upper face of the scintillator layer and an upper face of the sealing layer; and

    cutting the sensor substrate, the sealing layer, and the protection layer along a side of the pixel array such that a cut surface of the sensor substrate, a cut surface of the sealing layer, and a cut surface of the protection layer are arranged on the same plane.

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