METHODS FOR ADJUSTING ADHESION STRENGTH DURING SENSOR PROCESSING
First Claim
Patent Images
1. A method comprising:
- roughening a surface of a substrate;
applying a polymer to the surface of the substrate;
curing the polymer in a manner that causes the polymer to shrink; and
forming a sensor on the polymer.
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Abstract
The present disclosure is directed to systems and methods for adjusting adhesion strength between materials during semiconductor sensor processing. One or more embodiments are directed to using various surface treatments to a substrate to adjust adhesion strength between the substrate and a polymer. In one embodiment, the surface of the substrate is roughened to decrease the adhesive strength between the substrate and the polymer. In another embodiment, the surface of the substrate is smoothed to increase the adhesive strength between the substrate and the polymer.
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Citations
20 Claims
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1. A method comprising:
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roughening a surface of a substrate; applying a polymer to the surface of the substrate; curing the polymer in a manner that causes the polymer to shrink; and forming a sensor on the polymer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method comprising:
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etching a surface of a glass substrate to roughen the surface; depositing polyimide to the roughened surface of the glass substrate, the polyimide having first dimensions; curing the polyimide; and shrinking the polyimide to second dimensions when cured. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A method comprising:
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treating a surface of a substrate; applying polyimide to the surface of the substrate; curing the polyimide thereby causing the polyimide to shrink; and forming a sensor on an exposed surface of the polyimide. - View Dependent Claims (18, 19, 20)
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Specification