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DEFLECTION SENSOR FOR IN-SITU DEFLECTION MEASUREMENT IN SEMICONDUCTOR DEVICES

  • US 20140013855A1
  • Filed: 09/19/2013
  • Published: 01/16/2014
  • Est. Priority Date: 09/19/2006
  • Status: Abandoned Application
First Claim
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1. A deflection sensor comprising:

  • a substrate having a top surface;

    a nanotube film formed on the substrate, wherein the nanotube film includes a plurality of nanotubes aligned in a direction substantially parallel to the top surface of the substrate; and

    first and second contacts electrically connectable with the nanotube film, wherein a property of the nanotube film changes in response to a deflection of the substrate.

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