DEFLECTION SENSOR FOR IN-SITU DEFLECTION MEASUREMENT IN SEMICONDUCTOR DEVICES
First Claim
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1. A deflection sensor comprising:
- a substrate having a top surface;
a nanotube film formed on the substrate, wherein the nanotube film includes a plurality of nanotubes aligned in a direction substantially parallel to the top surface of the substrate; and
first and second contacts electrically connectable with the nanotube film, wherein a property of the nanotube film changes in response to a deflection of the substrate.
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Abstract
A deflection sensor is disclosed herein. The deflection sensor includes a nanotube film adjacent to a substrate, and first and second contacts electrically connectable with the nanotube film. Methods of making and using the deflection sensor are also disclosed.
10 Citations
24 Claims
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1. A deflection sensor comprising:
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a substrate having a top surface; a nanotube film formed on the substrate, wherein the nanotube film includes a plurality of nanotubes aligned in a direction substantially parallel to the top surface of the substrate; and first and second contacts electrically connectable with the nanotube film, wherein a property of the nanotube film changes in response to a deflection of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of using a deflection sensor comprising:
deflecting a nanotube film on a top surface of a substrate wherein the nanotube film includes a plurality of nanotubes, wherein the plurality of nanotubes are aligned in a direction parallel to the top surface of the substrate, wherein the plurality of nanotubes are electrically connectable with first and second contacts, and wherein deflecting the nanotube film applies a load to the substrate under conditions to stress the nanotube film.
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13. A method of in-situ deflection measurement comprising:
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applying a load to a nanotube film having a deflection sensor therein; and sensing a piezoresistive response of the deflection sensor. - View Dependent Claims (14, 15, 16, 17)
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18. A deflection sensor comprising:
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a substrate having a top surface; a nanotube film formed on the substrate, wherein the nanotube film includes a plurality of carbon nanotubes aligned in a direction substantially parallel to the top surface of the substrate; a passivation layer disposed over the nanotube film; first and second contacts electrically connectable with the nanotube film, wherein a property of the nanotube film changes in response to a deflection of the substrate, wherein each of the plurality of carbon nanotubes are aligned in a direction between the first and second contacts. - View Dependent Claims (19, 20, 21, 22, 23, 24)
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Specification