GAS-LIQUID PHASE TRANSITION METHOD AND APPARATUS FOR CLEANING OF SURFACES IN SEMICONDUCTOR MANUFACTURING

• US 20140014138A1
• Filed: 08/10/2011
• Published: 01/16/2014
• Est. Priority Date: 08/16/2010
• Status: Abandoned Application

• Current Assignee: Daniel Alvarez, Henricus Jozef Castelijns, Jeffrey J. Spiegelman, Luigi Scaccabarozzi, Russell J. Holmes, Sjoerd Nicolaas Lambertus Donders
• Original Assignee: Henricus Jozef Castelijns
• Inventors: Spiegelman, Jeffrey J., Alvarez, Daniel, Scaccabarozzi, Luigi, Donders, Sjoerd Nicolaas Lambertus, Castelijns, Henricus Jozef, Holmes, Russell J.
• Application Number:
  US13/817,088
• Publication Number:
  US 20140014138A1
• Time in Patent Office: Days
• US Class Current: 134/31
• CPC Class Codes: B08B 2230/01 Cleaning with steam
• CPC Class Codes: B08B 3/00 Cleaning by methods involving the use or presence of liquid or steam B08B9/00 takes precedence
• CPC Class Codes: B08B 3/04 Cleaning involving contact with liquid
• CPC Class Codes: B08B 3/10 with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
• CPC Class Codes: B08B 7/0014 by incorporation in a layer which is removed with the contaminants
• CPC Class Codes: G03F 1/24 Reflection masks; Preparation thereof
• CPC Class Codes: G03F 1/82 Auxiliary processes, e.g. cleaning or inspecting
• CPC Class Codes: G03F 7/16 Coating processes; Apparatus therefor applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74
• CPC Class Codes: G03F 7/427 using plasma means only
• CPC Class Codes: G03F 7/70925 Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
• CPC Class Codes: H01L 21/02052 Wet cleaning only H01L21/02085 takes precedence
• CPC Class Codes: H01L 21/67028 for cleaning followed by drying, rinsing, stripping, blasting or the like

Abstract

A method and apparatus for cleaning an article in semiconductor manufacturing are provided. The method includes subjecting a first chamber containing the article to a vapor source while controlling a temperature of the article and a temperature of the vapor source such that vapor from the vapor source condenses on a surface of the article to form a liquid film. The method further includes evaporating the liquid film, whereby the evaporating liquid transports contaminants from the surface of the article. Evaporating includes exposing the first chamber to condensing surfaces having a temperature lower than a temperature of the article, whereby the evaporated liquid condenses on the condensing surfaces. The apparatus includes a first chamber for housing the article, a vapor source connected to the first chamber, a temperature controller, and a second chamber connected with the first chamber to collect the vapor evaporated from the article.

Claims

1-75. -75. (canceled)

76. A method of cleaning an article, comprising:

(a) subjecting a first chamber containing the article having contaminants on a surface of the article to a vapor source while controlling a temperature of the article and a temperature of the vapor source relative to one another such that vapor from the vapor source condenses on the surface to form a liquid film; and

(b) evaporating the liquid film, whereby the evaporating liquid transports at least a portion of the contaminants away from the surface,

wherein the evaporating comprises exposing the first chamber to one or more condensing surfaces having a temperature lower than a temperature of the article, whereby the evaporated liquid condenses on the condensing surfaces.

77. The method according to claim 76, wherein the one or more condensing surfaces is a wall of a second chamber connected to the first chamber via a valve, and wherein the evaporating comprises opening the valve between the first chamber and the second chamber.

78. The method according to claim 76, wherein the surface of the article is held at a temperature of from about −

20°

C. to about 120°

C. during the condensing of the evaporated liquid.

79. The method according to claim 76, wherein the evaporating comprises exposing the first chamber to a lower pressure, whereby the evaporated liquid is removed from the first chamber.

80. The method according to claim 76, wherein the vapor source is a reservoir of a liquid controlled to have a temperature higher than that of the article.

81. The method according to claim 76, further comprising controlling a temperature of the walls of the first chamber to be higher than a temperature of the vapor source.

82. The method according to claim 76, further comprising controlling a pressure of the first chamber by a vacuum pump connected to the first chamber, wherein the vacuum pump is isolated from the first chamber prior to the evaporating.

83. The method according to claim 76, wherein the first chamber further comprises an electrostatic structure for attracting contaminant particles in the evaporated liquid film.

84. The method according to claim 76, wherein the vapor is delivered at a temperature of from about −

20°

C. to about 120°

C.

85. The method according to claim 76, wherein the vapor is delivered at a pressure of from about 0.1 torr to about 2000 torr.

86. The method according to claim 76, wherein the surface of the article is held at a temperature of from about −

20°

C. to about 120°

C. during the evaporating.

87. The method according to claim 76, wherein the vapor comprises high purity steam.

88. The method according to claim 76, wherein the vapor comprises one or more alcohols selected from the group consisting of methanol, ethanol, isopropanol, and organic molecules with one or more alcohol functional groups.

89. The method according to claim 76, wherein the vapor comprises one or more members of the group consisting of ammonia, primary amines, secondary amines, aqueous organic acids, and aqueous inorganic acids.

90. The method according to claim 76, wherein the vapor comprises one or more organic solvents.

91. The method according to claim 76, wherein the vapor comprises one or more organic solvents selected from the group consisting of chloroform, methylene chloride, hexane, toluene, diethylether, tetrahydrofuran, acetone, methylethylketone, acetonitrile, N-methylpyrrolidone, ethyl acetate, butyl acetate, and fluorinated hydrocarbons.

92. The method according to claim 76, further comprising repeating steps (a) and (b) at least one time.

93. The method according to claim 76, further comprising adsorbing nanoparticle or molecular contaminants from the evaporated liquid on a concentrator comprising a highly adsorbent material or coating.

94. A apparatus for cleaning an article, comprising:

a first chamber configured for housing the article having contaminants on a surface of the article;

a vapor source connected to the first chamber via a first valve;

a temperature controller configured to control a temperature of the article and a temperature of the vapor source relative to one another such that vapor from the vapor source condenses on a surface of the article to form a liquid film; and

a second chamber connected with the first chamber via a second valve, and configured to collect vapor evaporated from the article so as to transport contaminants away from the surface of the article.

95. The apparatus according to claim 94, wherein the temperature controller is further configured to control a temperature of the walls of the first chamber relative to the vapor source so as to prevent condensation of the vapor on the walls of the first chamber.