INSPECTION DEVICE

• US 20140014848A1
• Filed: 07/19/2013
• Published: 01/16/2014
• Est. Priority Date: 03/15/2011
• Status: Abandoned Application

• Current Assignee: Ebara Corporation
• Original Assignee: Ebara Corporation
• Inventors: Hatakeyama, Masahiro, Yoshikawa, Shoji, Murakami, Takeshi, Watanabe, Kenji, Naito, Yoshihiko, Toma, Yasushi, Karimata, Tsutomu, Hayashi, Takehide, Tsukamoto, Kiwamu, Kohama, Tatsuya, Kobayashi, Noboru
• Application Number:
  US13/946,198
• Publication Number:
  US 20140014848A1
• Time in Patent Office: Days
• US Class Current: 250/393
• CPC Class Codes: G01N 2223/611 patterned objects; electronic devices
• CPC Class Codes: G01N 23/223 by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
• CPC Class Codes: G01N 23/2251 using incident electron beams, e.g. scanning electron microscopy [SEM]
• CPC Class Codes: H01J 1/34 Photo-emissive cathodes H01J1/35 takes precedence
• CPC Class Codes: H01J 2237/0048 Charging arrangements
• CPC Class Codes: H01J 2237/022 Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
• CPC Class Codes: H01J 2237/032 Mounting or supporting
• CPC Class Codes: H01J 2237/038 Insulating
• CPC Class Codes: H01J 2237/045 Diaphragms
• CPC Class Codes: H01J 2237/0458 movable, i.e. for changing between differently sized apertures
• CPC Class Codes: H01J 2237/0473 accelerating
• CPC Class Codes: H01J 2237/0492 Lens systems individual lenses H01J2237/10
• CPC Class Codes: H01J 2237/061 Construction
• CPC Class Codes: H01J 2237/06333 Photo emission
• CPC Class Codes: H01J 2237/166 Sealing means
• CPC Class Codes: H01J 2237/186 Valves
• CPC Class Codes: H01J 2237/2002 Controlling environment of sample
• CPC Class Codes: H01J 2237/2007 Holding mechanisms
• CPC Class Codes: H01J 2237/2008 specially adapted for studying electrical or magnetical properties of objects
• CPC Class Codes: H01J 2237/2448 Secondary particle detectors
• CPC Class Codes: H01J 2237/2482 : Optical means
• CPC Class Codes: H01J 2237/2485 : Electric or electronic means
• CPC Class Codes: H01J 2237/2817 : Pattern inspection
• CPC Class Codes: H01J 2237/2855 : Photo-emission
• CPC Class Codes: H01J 2237/2857 : Particle bombardment induced emission
• CPC Class Codes: H01J 37/073 : Electron guns using field emission, photo emission, or secondary emission electron sources
• CPC Class Codes: H01J 37/09 : Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
• CPC Class Codes: H01J 37/10 : Lenses
• CPC Class Codes: H01J 37/20 : Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support introducing the objects H01J37/18
• CPC Class Codes: H01J 37/222 : Image processing arrangements associated with the tube image data processing or generation, in general G06T
• CPC Class Codes: H01J 37/244 : Detectors; Associated components or circuits therefor
• CPC Class Codes: H01J 37/265 : Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
• CPC Class Codes: H01J 37/28 : with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence
• CPC Class Codes: H01J 37/29 : Reflection microscopes

Abstract

An inspection device for inspecting a surface of an inspection object using a beam includes a beam generator capable of generating one of either charge particles or an electromagnetic wave as a beam, a primary optical system capable of guiding and irradiating the beam to the inspection object supported within a working chamber, a secondary optical system capable of including a first movable numerical aperture and a first detector which detects secondary charge particles generated from the inspection object, the secondary charge particles passing through the first movable numerical aperture, an image processing system capable of forming an image based on the secondary charge particles detected by the first detector; and a second detector arranged between the first movable numerical aperture and the first detector and which detects a location and shape at a cross over location of the secondary charge particles generated from the inspection object.

Claims

1. An inspection device comprising:

a laser generator generating a laser being irradiated to an inspection object supported within a working chamber;

a secondary optical system having a detector detecting secondary charge particles generated from the inspection object irradiated with the laser; and

an image processing system forming an image based on the secondary charge particles detected by the detector.

2. The inspection device according to claim 1, the detector detecting the secondary charge particles generated from a surface opposite a surface of the inspection object irradiated with the laser.

3. The inspection device according to claim 1, the detector detecting the secondary charge particles generated from a surface of the inspection object irradiated with the laser.

4. The inspection device according to claim 3 further comprising:

a primary optical system guiding the laser generated by the laser generator to the inspection object.

5. The inspection device according to claim 3 further comprising:

a hollow fiber or a hollow pipe guiding the laser generated by the laser generator to the inspection object.

6. The inspection device according to claim 1, the laser including wavelengths of either UV, DUV, EUV or X-ray.

7. The inspection device according to claim 1, the laser generator having a first light source generating a first wavelength laser and a second light source generating a second wavelength laser.

8. The inspection device according to claim 7, the first wavelength laser and the second wavelength laser being irradiated to the inspection object alternately.

9. The inspection device according to claim 1, the secondary optical system further having:

a first lens accelerating the secondary charge particles generated from the inspection object;

a second lens group changing a magnification factor by converging the secondary accelerated charge particles and forming a cross over the numerical aperture; and

a third lens forming an image of the secondary charge particles passing through the second lenses on the detector.