ELECTROSTATIC CHARGE REMOVAL FOR SOLAR CELL GRIPPERS

• US 20140023461A1
• Filed: 07/22/2012
• Published: 01/23/2014
• Est. Priority Date: 07/22/2012
• Status: Active Grant

• Current Assignee: Varian Semiconductor Equipment Associates Incorporated (Applied Materials Incorporated)
• Original Assignee: Varian Semiconductor Equipment Associates Incorporated (Applied Materials Incorporated)
• Inventors: Schaller, Jason, Vopat, Robert Brent
• Granted Patent: US 9,064,920 B2
• Time in Patent Office: Days
• US Class Current: 414/222.07
• CPC Class Codes: B25J 11/0095 Manipulators transporting wafers
• CPC Class Codes: B25J 15/0616 with vacuum
• CPC Class Codes: B65G 2207/10 Antistatic features
• CPC Class Codes: B65G 2812/16 Pneumatic conveyors
• CPC Class Codes: B65G 49/06 for fragile sheets, e.g. glass
• CPC Class Codes: H01L 21/67706 Mechanical details, e.g. roller, belt H01L21/67709 takes precedence
• CPC Class Codes: H01L 21/67742 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/67766 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/67781 Batch transfer of wafers
• CPC Class Codes: H05F 3/02 by means of earthing connections

Abstract

A manufacturing system includes a gantry module, having an end effector, for moving workpieces from a conveyor system to a working area, such as a swap module. The swap module removes a matrix of processed workpieces from a load lock and place a matrix of unprocessed workpieces in its place. The processed workpieces are then moved by the gantry module back to the conveyor. Due to the speed of operation, the end effector may build up excessive electrostatic charge. To remove this built up charge, grounded electrically-conductive brushes are strategically positioned so that, as the end effector moves during normal operation, it comes in contact with these brushes. This removes this built up charge on the end effector, without affecting throughput. In another embodiment, the end effector moves over the brushes while the swap module is moving matrix to and from the load lock.

Claims

1. A workpiece handling system, comprising a gantry module for moving a plurality of workpieces from a first location to a second location, said gantry module comprising:

an end effector having one or more grippers for picking up said workpieces;

an actuator to move said end effector; and

brushes that are grounded and electrically-conductive located in a position accessible to said end effector.

2. The workpiece handling system of claim 1, wherein said brushes comprise carbon fiber.

3. The workpiece handling system of claim 1, wherein said first location comprises one or more belt modules, and said brushes are adjacent to said one or more belt modules.

4. A method of removing electrostatic charge from an end effector of a workpiece handling system, comprising:

using said end effector to pick up a workpiece from a source;

moving said end effector with said workpiece to a working area;

placing said workpiece in said working area;

moving said end effector so as to contact brushes that are grounded and electrically-conductive with said end effector while said workpiece is being processed in said working area.

5. The method of claim 4, wherein said end effector returns to said working area before said workpiece has completed processing in said working area.

6. The method of claim 4, further comprising using a robot to move said workpiece from said working area to a load lock, to retrieve a processed workpiece from said load lock, and to place said processed workpiece in said working area.

7. The method of claim 6, wherein said end effector returns to said working area to pick up said processed workpiece.

8. The method of claim 7, wherein said end effector returns before said processed workpiece is placed in said working area.

9. A method of removing electrostatic charge from an end effector of a workpiece handling system, comprising:

using said end effector to pick up a workpiece from a source;

moving said end effector with said workpiece to a location;

placing said workpiece at said location;

returning to said source to retrieve a second workpiece; and

contacting brushes that are grounded and electrically-conductive with said end effector while moving to said source and when said end effector is not carrying a workpiece.

10. The method of claim 9, wherein said end effector travels at a first vertical height while moving to said location, and a second vertical height, less than said first vertical height, while returning to said source.

11. The method of claim 9, wherein said location is a destination.

12. The method of claim 9, wherein said location is a working area, and said method further comprises moving workpieces from said working area to a destination prior to returning to said source to retrieve a second workpiece.