COAT AS WELL AS METHOD AND DEVICE FOR COATING
First Claim
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1. A method for application of a coat onto a substrate comprising the steps of:
- generating a plasma beam of a low temperature plasma by leading a working gas through an excitation zone; and
,supplying platelet-shaped particles with a mean thickness between 10 and 50,000 nanometers and a form factor in the value range of 10 to 2000 are supplied into the plasma beam directed at the substrate.
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Abstract
The invention relates to a method and a device for applying a coating to a substrate, where a plasma jet of a low-temperature plasma is produced by conducting a working gas through an excitation zone. The plasma jet is directed at the substrate, and plate-shaped particles having an average thickness between 10 and 50,000 nanometers and a shape factor in a value range from 10 to 2000 are fed into the plasma jet. The plate-shaped particles are fed into the plasma jet by means of a carrier gas. The plasma jet is produced by exciting the working gas by means of an alternating voltage or a pulsed direct voltage.
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Citations
19 Claims
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1. A method for application of a coat onto a substrate comprising the steps of:
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generating a plasma beam of a low temperature plasma by leading a working gas through an excitation zone; and
,supplying platelet-shaped particles with a mean thickness between 10 and 50,000 nanometers and a form factor in the value range of 10 to 2000 are supplied into the plasma beam directed at the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A device for application of a coat onto a substrate, comprising:
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a beam generator with an inlet for the supply of a flowing working gas; an outlet for a plasma beam led by the flowing working gas; an alternating voltage source or a pulsed direct voltage source which are connected two electrodes of the beam generator, to form a discharge path along which the working gas is led; and
,at least one feed opening of the beam generator is arranged such that it discharging in an area of the discharge path and through which plate-shaped particles are supplied to the plasma beam. - View Dependent Claims (17, 18)
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19. A coat on a substrate comprises:
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platelet-shaped particles, which are at least partially fused with one another; and
,the platelet-shaped particles have a mean thickness H between 10 and 50,000 nanometers and a form factor F in the value range of 10 to 2000 for application of the coat onto a substrate using a gas-led plasma beam of a low temperature plasma.
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Specification