CAPACITIVE SENSOR COMPRISING DIFFERING UNIT CELL STRUCTURES

• US 20140026642A1
• Filed: 07/25/2012
• Published: 01/30/2014
• Est. Priority Date: 07/25/2012
• Status: Abandoned Application

• Current Assignee: Silicon Laboratories Incorporated
• Original Assignee: Silicon Laboratories Incorporated
• Inventors: O'Connell, John O.
• Application Number:
  US13/557,820
• Publication Number:
  US 20140026642A1
• Time in Patent Office: Days
• US Class Current: 73/31.05
• CPC Class Codes: G01N 2027/222 for analysing gases
• CPC Class Codes: G01N 27/223 for determining moisture content, e.g. humidity rain detectors on vehicle windows B60S1/0825

Abstract

A gas and/or humidity sensor system may include two differing capacitive sensor unit cell structures. A first unit cell has a capacitance measurement that is dependent upon capacitance effects that substantially do not extend to the upper reaches of the sensor'"'"'s gas/humidity sensitive layer and a second unit cell has a capacitance measurement that is dependent upon electric field effects that extend substantially beyond the distance of the electric fields of the first unit cell. The capacitance associated with the electric fields in the upper regions of the gas/humidity sensitive layer may then be obtained to a first order by subtracting the capacitance of the first unit cell from the capacitance of the second unit cell. By subtracting the capacitance, a capacitance associated with the capacitance of the electric fields of the layer (or portion of layer) of interest may be approximated.

Claims

1. A capacitive gas sensor comprising:

a gas sensitive material, the gas sensor configured to allow the exposure of the gas sensitive material to a gas;

a first capacitive sensor cell having first capacitor electrodes, the first capacitor electrodes having a first set of dimensions, the first capacitive sensor cell being electrically coupled to a first portion of the gas sensitive material;

a second capacitive sensor cell having second capacitor electrodes, the second capacitor electrodes having a second set of dimensions, the second set of dimensions being different from the first set of dimensions, the second capacitive sensor being electrically coupled to a second portion of the gas sensitive material; and

the second set of dimensions being configured in relation to the first set of dimensions such that electric fields of the second capacitor electrodes extend proportionally further into gas sensitive material than electric fields of the first capacitor electrodes;

wherein a combination of the detected capacitance of the first capacitive sensor cell and the second capacitive sensor cell is utilized to obtain a gas sensor measurement.

2. The gas sensor of claim 1, further comprising circuitry coupled to the first capacitive sensor cell and the second capacitive sensor cell, the circuitry subtracting a capacitance of the first capacitive sensor cell from a capacitance of the second capacitive sensor cell.

3. The gas sensor of claim 2, wherein subtraction of the capacitance of the first capacitive sensor cell provides an approximation of capacitive properties of a region of interest of the gas sensitive material while decreasing capacitance effects of areas of non-interest.

4. The gas sensor of claim 1, the circuitry comprising a summing amplifier.

5. The gas sensor of claim 1, wherein the gas sensor is a relative humidity.

6. The gas sensor of claim 5, further comprising circuitry coupled to the first capacitive sensor cell and the second capacitive sensor cell, the circuitry subtracting a capacitance of the first capacitive sensor cell from a capacitance of the second capacitive sensor cell.

7. The gas sensor of claim 6, wherein subtraction of the capacitance of the first capacitive sensor cell provides an approximation of capacitive properties of a region of interest of the gas sensitive material while decreasing capacitance effects of areas of non-interest.

8. The gas sensor of claim 1, further comprising an intervening layer between gas sensitive material and the first and second capacitor electrodes.

9. The gas sensor of claim 8, wherein the electric fields of the first capacitor electrodes substantially are limited to areas not within the gas sensitive material.

10. The gas sensor of claim 1, the first and second dimensions having a differing periodicity, the periodicity of the second capacitor electrodes being larger than the periodicity of the first capacitor electrodes.

11. The gas sensor of claim 10, wherein the periodicity of the second capacitor electrodes is 30% or more greater than the periodicity of the first capacitor electrodes.

12. The gas sensor of claim 10, wherein the periodicity of the second capacitor electrodes is 50% or more greater than the periodicity of the first capacitor electrodes.

13. A method of forming a gas sensor, comprising:

providing a gas sensitive material, the gas sensitive material provided to allow for exposure of the gas sensitive material to a gas;

providing a first set of capacitor electrodes, the first set of capacitor electrodes having a first set of dimensions;

providing a second set of capacitor electrodes, the second capacitor electrodes having a second set of dimensions, the second set of dimensions being different from the first set of dimensions;

configuring the second set of dimensions to provide proportionally more capacitor electric fields of the second set of capacitor electrodes within the gas sensitive material than the electric fields of the first set of capacitor electrodes; and

configuring the gas sensor to utilize a combination of the detected capacitance of the first capacitor electrodes and the second capacitor electrodes to obtain a gas sensor measurement.

14. The method of claim 13, wherein gas sensor is configured to utilize the combination of the detected capacitance of the first capacitor electrodes and the second capacitor electrodes to obtain a gas sensor measurement by subtracting a first capacitance of the first set of capacitor electrodes from a second capacitance of the second set of capacitor electrodes.

15. The method of claim 13, the gas sensitive material being a humidity sensitive material, the gas sensor measurement being a relative humidity measurement.

16. The method of claim 15, the subtracting utilizing a summing node technique.

17. The method of claim 13, the gas sensitive material being a humidity sensitive material, the gas sensor measurement being a relative humidity measurement.

18. The method of claim 13, the first set of capacitor electrodes having a first periodicity value and the second set of capacitor electrodes having a second periodicity value, the first periodicity value being a smaller than the second periodicity value.

19. The gas sensor of claim 18, wherein the second periodicity value is 30% or more greater than the first periodicity value.

20. The method of claim 13, the combination of the detected capacitances the first capacitor electrodes and the second capacitor electrodes to allowing the gas sensor measurement to be focused upon a region of interest.

21. The method of claim 20, the differing first and second dimensions lessons the impact of undesirable parasitic capacitances or interface capacitance effects within the gas sensor measurement.

22. The method of claim 13, further comprising providing an intervening layer between the gas sensitive material and the first and second capacitor electrodes.

23. The method of claim 13, wherein the combination of the detected capacitances the first capacitor electrodes and the second capacitor electrodes lessens the effects of electric fields that are outside the most relevant portions of the gas sensitive material.