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MEMS Apparatus Disposed On Assembly Lid

  • US 20140037115A1
  • Filed: 07/29/2013
  • Published: 02/06/2014
  • Est. Priority Date: 08/01/2012
  • Status: Active Grant
First Claim
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1. A Microelectromechanical system (MEMS) assembly comprising,a base substrate having electrical connection pads, the electrical connection pads coupled to electrical conductors extending through the base substrate;

  • a lid;

    a MEMS device, the MEMS device attached to the lid and mounted over an acoustic port;

    at least one wall coupled to the lid and the base substrate, such that the wall contains vertical electrical connections, with at least one wall being formed separately from the lid and the wall having an electrical conduit disposed therein, the electrical conduit coupled electrically to the conductors on the base substrate,such that the electrical conduit and electrical conductors form an electrical path between the MEMS device and the electrical connection pads.

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