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Microphone Assembly

  • US 20140037120A1
  • Filed: 07/29/2013
  • Published: 02/06/2014
  • Est. Priority Date: 08/01/2012
  • Status: Abandoned Application
First Claim
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1. A Microelectromechanical system (MEMS) assembly comprising:

  • a cover;

    a substrate;

    at least one wall disposed and between and attached to the cover and the substrate;

    a MEMS device disposed at the cover;

    an integrated circuit disposed at the substrate;

    such that the integrated circuit and the MEMS device are disposed one over the other and electrically connected together at least in part by conduits that extend through the walls.

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