Microphone Assembly
First Claim
Patent Images
1. A Microelectromechanical system (MEMS) assembly comprising:
- a cover;
a substrate;
at least one wall disposed and between and attached to the cover and the substrate;
a MEMS device disposed at the cover;
an integrated circuit disposed at the substrate;
such that the integrated circuit and the MEMS device are disposed one over the other and electrically connected together at least in part by conduits that extend through the walls.
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Accused Products
Abstract
A Microelectromechanical system (MEMS) assembly includes a cover, a substrate, at least one wall disposed and between and attached to the cover and the substrate, a MEMS device disposed at the cover and an integrated circuit disposed at the substrate. The integrated circuit and the MEMS device are disposed one over the other and electrically connected together at least in part by conduits that extend through the walls. Alternatively, the MEMS device may be disposed on the substrate and the integrated circuit disposed on the base.
36 Citations
10 Claims
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1. A Microelectromechanical system (MEMS) assembly comprising:
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a cover; a substrate; at least one wall disposed and between and attached to the cover and the substrate; a MEMS device disposed at the cover; an integrated circuit disposed at the substrate; such that the integrated circuit and the MEMS device are disposed one over the other and electrically connected together at least in part by conduits that extend through the walls. - View Dependent Claims (2, 3, 4, 5)
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6. A Microelectromechanical system (MEMS) assembly comprising:
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a cover; a substrate; at least one wall disposed and between and attached to the cover and the substrate; a MEMS device disposed at the substrate; an integrated circuit disposed at the cover; such that the integrated circuit and the MEMS device are disposed one over the other and electrically connected together at least in part by conduits that extend through the walls. - View Dependent Claims (7, 8, 9, 10)
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Specification