METHOD FOR FORMING A LITHIUM-ION TYPE BATTERY
First Claim
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1. A method for manufacturing a lithium-ion type battery, comprising the steps of:
- (a) forming in a substrate a recess having lateral walls having a re-entrant profile;
(b) depositing, by successive non-conformal physical vapor depositions, a stack of different layers forming a lithium-ion type battery, this stack having a thickness smaller than the depth of the recess;
(c) depositing on the structure a filling layer filling the space remaining in the recess; and
(d) planarizing the structure to expose the upper surface of the stack.
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Abstract
A method for manufacturing a lithium-ion type battery including the steps of forming in a substrate a recess having lateral walls having a re-entrant profile; depositing, by successive non-conformal physical vapor depositions, a stack of the different layers forming a lithium-ion battery, this stack having a thickness smaller than the depth of the recess; depositing on the structure a filling layer filling the space remaining in the recess; and planarizing the structure to expose the upper surface of the stack.
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Citations
8 Claims
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1. A method for manufacturing a lithium-ion type battery, comprising the steps of:
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(a) forming in a substrate a recess having lateral walls having a re-entrant profile; (b) depositing, by successive non-conformal physical vapor depositions, a stack of different layers forming a lithium-ion type battery, this stack having a thickness smaller than the depth of the recess; (c) depositing on the structure a filling layer filling the space remaining in the recess; and (d) planarizing the structure to expose the upper surface of the stack. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification