MICROMACHINED PIEZOELECTRIC X-AXIS GYROSCOPE
First Claim
1. A method of fabricating a gyroscope, the method comprising:
- depositing conductive material on a substrate;
forming an anchor on the substrate;
forming a drive frame on the anchor;
forming pairs of drive beams on opposing sides of the anchor, the drive beams connecting the drive frame to the anchor, the drive beams being configured to constrain the drive frame to rotate substantially in the plane of the drive beams;
forming a proof mass around the drive frame; and
forming a plurality of sense beams that connect the drive frame to the proof mass, the sense beams being tapered sense beams having a width that decreases with increasing distance from the anchor, the sense beams being configured to allow sense motions of the proof mass in a sense plane substantially perpendicular to the plane of the drive beams in response to an applied angular rotation.
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Accused Products
Abstract
This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Some gyroscopes include a drive frame, a central anchor and a plurality of drive beams disposed on opposing sides of the central anchor. The drive beams may connect the drive frame to the central anchor. The drive beams may include a piezoelectric layer and may be configured to cause the drive frame to oscillate torsionally in a plane of the drive beams. The gyroscope may also include a proof mass and a plurality of piezoelectric sense beams. At least some components may be formed from plated metal. The drive frame may be disposed within the proof mass. The drive beams may constrain the drive frame to rotate substantially in the plane of the drive beams. Such devices may be included in a mobile device, such as a mobile display device.
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Citations
19 Claims
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1. A method of fabricating a gyroscope, the method comprising:
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depositing conductive material on a substrate; forming an anchor on the substrate; forming a drive frame on the anchor; forming pairs of drive beams on opposing sides of the anchor, the drive beams connecting the drive frame to the anchor, the drive beams being configured to constrain the drive frame to rotate substantially in the plane of the drive beams; forming a proof mass around the drive frame; and forming a plurality of sense beams that connect the drive frame to the proof mass, the sense beams being tapered sense beams having a width that decreases with increasing distance from the anchor, the sense beams being configured to allow sense motions of the proof mass in a sense plane substantially perpendicular to the plane of the drive beams in response to an applied angular rotation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification