METHOD OF ADJUSTING LIGHTING OPTICAL DEVICE, LIGHTING OPTICAL DEVICE, EXPOSURE SYSTEM, AND EXPOSURE METHOD
First Claim
1. An illumination optical apparatus which illuminates a surface to be illuminated with light from a light source, the apparatus comprising:
- a distributing optical system which distributes light from the light source on or near a pupil plane of the illumination optical apparatus; and
a polarization changing unit havinga polarization converting element which is movable in a direction crossing an optical axis of the illumination optical apparatus and converts a polarization state of an incident light thereto into a predetermined polarization state, anda driver which sets a position of the polarization converting element in an optical path of the illumination optical apparatus in the direction crossing the optical axis of the optical path of the illumination optical apparatus to be a predetermined position,wherein the polarization changing unit, with respect to a polarization state of a light distributed in a first region on or near the pupil plane of the illumination optical apparatus, changes a polarization state of light distributed on a second region different from the first region.
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Accused Products
Abstract
An illumination optical apparatus is arranged to illuminate a surface to be illuminated, with light in a desired polarization state, without substantive influence of manufacturing error of an optical member functioning as a wave plate. The illumination optical apparatus illuminates the surface to be illuminated on the basis of light from a light source. The illumination optical apparatus is provided with a polarization converting element disposed on or near an illumination pupil plane and adapted for converting a polarization state of incident light into a predetermined polarization state. The polarization converting element has a plurality of variable optical rotating members for variably yielding an angle of rotation to incident linearly polarized light. Each variable optical rotating member has two deviation prisms which are made of an optical material with an optical rotatory power and which are movable relative to each other along a direction intersecting with the optical axis.
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Citations
21 Claims
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1. An illumination optical apparatus which illuminates a surface to be illuminated with light from a light source, the apparatus comprising:
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a distributing optical system which distributes light from the light source on or near a pupil plane of the illumination optical apparatus; and a polarization changing unit having a polarization converting element which is movable in a direction crossing an optical axis of the illumination optical apparatus and converts a polarization state of an incident light thereto into a predetermined polarization state, and a driver which sets a position of the polarization converting element in an optical path of the illumination optical apparatus in the direction crossing the optical axis of the optical path of the illumination optical apparatus to be a predetermined position, wherein the polarization changing unit, with respect to a polarization state of a light distributed in a first region on or near the pupil plane of the illumination optical apparatus, changes a polarization state of light distributed on a second region different from the first region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An exposure method for projecting a predetermined pattern illuminated by light from a light source onto a photosensitive substrate to effect exposure thereof, the method comprising:
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distributing light from the light source on or near a pupil plane of an illumination optical apparatus; and changing, with respect to a polarization state of a light distributed in a first region on or near the pupil plane of the illumination optical apparatus, a polarization state of light distributed on a second region different from the first region, wherein the changing includes moving a polarization converting element which converts the polarization state of an incident light into a predetermined polarization state, along a direction crossing an optical path of the illumination optical apparatus. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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Specification