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RESONANT MEMS LORENTZ-FORCE MAGNETOMETER USING FORCE-FEEDBACK AND FREQUENCY-LOCKED COIL EXCITATION

  • US 20140049256A1
  • Filed: 12/28/2012
  • Published: 02/20/2014
  • Est. Priority Date: 07/25/2012
  • Status: Active Grant
First Claim
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1. A method comprising:

  • supplying a current to at least one conductive path integral with a microelectromechanical system (MEMS) device to thereby exert a Lorentz force on the MEMS device in the presence of a magnetic field; and

    determining the magnetic field based on a control value in a control loop configured to maintain a constrained range of motion of the MEMS device.

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