PHOTONIC DEVICE
First Claim
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1. A photonic device comprising:
- a semiconductor layer including first and second regions;
an insulating layer covering the semiconductor layer; and
first and second plugs extending to pass through the insulating layer and electrically connected to the corresponding first and second regions;
wherein the first plug is in a rectifying contact with the first region, and the second plug is in an ohmic contact with the second region.
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Abstract
A photonic device is provided. The photonic device includes: a semiconductor layer including first and second regions; an insulating layer covering the semiconductor layer; and first and second plugs extending to pass through the insulating layer and electrically connected to the corresponding first and second regions. The first plug is in a rectifying contact with the first region, and the second plug is in an ohmic contact with the second region.
8 Citations
20 Claims
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1. A photonic device comprising:
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a semiconductor layer including first and second regions; an insulating layer covering the semiconductor layer; and first and second plugs extending to pass through the insulating layer and electrically connected to the corresponding first and second regions; wherein the first plug is in a rectifying contact with the first region, and the second plug is in an ohmic contact with the second region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A system, comprising:
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at least one electro-optical modulator configured to modulate an optical signal to generate a modulated optical signal; wherein each electro-optical modulator includes a phase shifter comprising; a semiconductor layer including first and second regions; an insulating layer covering the semiconductor layer; and first and second plugs extending to pass through the insulating layer and electrically connected to the corresponding first and second regions; wherein the first plug is in a rectifying contact with the first region, and the second plug is in an ohmic contact with the second region.
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18. A method, comprising:
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forming a semiconductor layer including first and second regions on a substrate; doping the second region; forming a rectifying contact with the first region; and forming an ohmic contact with the second region. - View Dependent Claims (19, 20)
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Specification